Operations Model 6DS-SP Planarizer
2 - 40 Version 4.0 - February 1998
VACUUM SEPARATOR
Related Engineering Drawings
• 219771A1
Vacuum System Assembly
• 219771P1
Vacuum System Diagram
EXHAUST
The machine exhaust duct (4) connection is to a vacuum source rated at
approximately 250 SCFM. A six-inch duct or hose is required to connect to the
exhaust duct.
TEMPERATURE-CONTROLLED WATER
The coolant in (11) and coolant out (6) permit the cycling of temperature-
controlled water through the polish table for a temperature-controlled polishing
process. Both connections require mating to the machine's 3/4-inch PVC
threaded pipe joints. The pressure regulator adjusts the pressure of the liquid
flowing through the loop. The coolant in (11) and coolant out (6) must be
connected to the temperature control unit.
A bypass valve, coolant bypass (11A), mounted at the rear of the machine,
provides overpressure protection for the polish table. If coolant back pressure
rises above 10 PSI, the coolant bypass valve opens and dumps to the table drain
(8) to prevent damage to the table.
TEMPERATURE CONTROL UNIT
• Manufacturer’s
Data
Neslab HX-150 Temperature Control Unit
For connection of utilities to the temperature control unit, refer to the Neslab
documentation in the Manufacturers’ Data section of the Appendices of the 6DS-
SP Maintenance manual.
EMO Circuit for Temperature Control Unit: An emergency off unit for the
temperature control unit is available as an accessory (SA236117). It is mounted
in a separate enclosure providing “EMO” and “Machine On” buttons, “Power
On” and “Machine On” lights, and a main disconnect. Refer to engineering
drawings 236117A1 and 236117E1.
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