Contents - 3
Figures and Tables
Fig. 1 Dimensional drawing of GLD-137CC oil sealed rotary vacuum pump ······· 4
Fig. 2 Dimensional drawing of GLD-202BB oil sealed rotary vacuum pump ······· 5
Fig. 3 Transportation method of the oil sealed rotary vacuum pump ··········· 6
Fig. 4 Lubrication of the oil sealed rotary vacuum pump ······················ 7
Fig. 5 Basic piping diagram to the vacuum chamber ·························· 8
Fig. 6 Changeover switch in the terminal box ··························· 9
Fig. 7 Electric wiring diagram ·························· 11
Fig. 8 An Inlet(EN60320) ·························· 11
Fig. 9 Change region of the voltage and frequency ·························· 12
Fig. 10 Pumping speed curve ·························· 19
Fig. 11 Replacement of the coupling spider ·························· 24
Fig. 12 Disassembly drawing of GLD-137CC oil sealed rotary vacuum pump ······· 30
Fig. 13 Disassembly drawing of GLD-202BB oil sealed rotary vacuum pump ······· 31
Table 1 Specification ·························· 3
Table 2 Characteristics of the thermal protector ·························· 16
Table 3 Periodic inspection table ·························· 21
Table 4 Trouble check list ·························· 25
Table 5 GLD-137CC Maintenance parts list ·························· 28
Table 6 GLD-202BB Maintenance parts list ·························· 29
Attached table: Safety Data Sheet for Vacuum Pump Oil SMR-100
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