Ulvac ULK-10A - Table of Contents

SK00-4802-DI-002-04
No.16.10.20
Contents-1
Table of Contents
0. Before Use ........................................................................................................................ i
0.1 Safety symbol mark ................................................................................................................ ii
0.2 Definition of safety symbol mark ............................................................................................. ii
0.3 Safety precautions ................................................................................................................. iii
0.4 Type/Description and position of warning label on this machine ............................................ ix
0.5 Acceptance and storage of pump ........................................................................................... x
0.5.1 Acceptance of unpacked pump ............................................................................................................................................. x
0.5.2 Transportation ............................................................................................................................................................................. xi
0.5.3 Ambient conditions during storage, installation, and operation .............................................................................. xii
0.6 Protective equipment ........................................................................................................... xiii
1. For Safe Use .................................................................................................................... 1
1.1 Product-specific risk and safety measure ............................................................................... 1
1.1.1 Leakage of hazardous gas and substances .................................................................................................... 1
1.1.2 Transportation of heavy load items ................................................................................................................... 1
1.1.3 Electric shock ............................................................................................................................................................. 2
1.1.4 High temperature ....................................................................................................................................................... 2
1.1.5 Leakage of high-temperature cooling water .................................................................................................. 3
1.1.6 Rise of oil .................................................................................................................................................................... 3
1.1.7 Explosion ....................................................................................................................................................................... 4
1.2 Material safety data sheet (SDS) ............................................................................................ 5
2. Overview .......................................................................................................................... 6
2.1 About oil diffusion pump ......................................................................................................... 6
2.2 Performance specifications .................................................................................................... 7
3 Mounting ......................................................................................................................... 13
3.1 Installation ............................................................................................................................ 13
3.1.1 Preparation ............................................................................................................... 13
3.2 Oil filling ............................................................................................................................... 14
3.3 Water piping ......................................................................................................................... 15
3.4 Intake port pipe (Connection to vacuum chamber side) ........................................................ 16
3.5 Exhaust port pipe (Piping to auxiliary pump) ........................................................................ 17
3.6 Electric Connection .............................................................................................................. 19
4. Operation ....................................................................................................................... 22
4.1 Operational precautions ....................................................................................................... 22