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Ulvac ULK-10A - Attachment of New Heater

Ulvac ULK-10A
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SK00-4802-DI-002-04
No.16.10.20
42
6.2.9 Attachment of new heater
For ULK-04A,ULK-06A
See Figs. 14
(1) On the side where the heater pump is attached, spread evenly thermo cement of 1 to 2mm in
thickness across the front surface.
(2) Set the heater to the mounting position and securely tighten the nut 4-1.
(3) Remove the thermo cement coming out of the joint surface between the heater and the
pump.
(4) Attach the reflector and securely tighten nut 4-2.
(5) Attach the heater cover in an oblique direction so that the heater terminals are put in the
holes of the heater cover.
Use molybdenum disulfide to prevent it from being seized up in attachment of the hexagon
nuts 4-1, 4-2 (11).
(6) Carry out the wiring in the terminal box. After that, connect the wires from the switch board.
Note that if heated under the condition where the thermo cement is not dried enough, the
cement spout, resulting in an improper condition.

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