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Veeco Dimension 3100 User Manual

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Document Revision History: DImension 3100 Manual
Revision Date Section(s) Affected
Ref.
DCR
Approval
D 03/09/04 All. N/A C. Kowalski
C 05/15/03 Fluid Cell N/A L. Burrows
B 06/01/00 All. 313 A. Varbel
A 08/25/97 Released. N/A M. Leilani
Copyright © [2004] Veeco Instruments Inc.
All rights reserved.
Dimension 3100 Manual
NanoScope Software Version 5
004-320-000 (standard)
004-320-100 (cleanroom)

Table of Contents

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Veeco Dimension 3100 Specifications

General IconGeneral
TypeAtomic Force Microscope (AFM)
Z Range6.5 μm
SoftwareNanoscope
XY Resolution1 nm
Z Resolution0.1 nm
Sample SizeUp to 200 mm diameter
Image Resolution512 x 512 pixels
Resolution1 nm
Tip TypeSilicon
Operating ModeContact, Tapping
ModesContact, Tapping

Summary

Chapter 1 System Overview

1.1 System Overview

Provides a general overview of the Dimension 3100 Scanning Probe Microscope and its configurations.

1.2 Control Station Overview

Details the components of the Dimension 3100 SPM control station including input/display devices and controllers.

1.3 Dimension 3100 SPM Overview

Describes the main components of the Dimension 3100 SPM system, including electronics, optics, and head.

1.4 Sample Size & Handling

Specifies the maximum sample size and thickness, and handling recommendations for the Dimension 3100.

1.7 Maintenance and Troubleshooting

Directs users to Chapter 18 for detailed information on maintaining and troubleshooting the Dimension 3100 SPM.

Chapter 2 Safety

2.1 Safety Requirements

Details safety symbols and their meanings, covering hazards like electrical, laser, and mechanical risks.

2.2 Safety Precautions

Outlines essential precautions for operators to avoid injury and equipment damage, including general safety.

2.2.1 General Operator Safety

Provides critical safety guidelines for operators, emphasizing qualified personnel and adherence to safety regulations.

2.6 Power-up Sequence (Installation and Service Only)

Details the procedures for powering up the system during installation or servicing, including pre-checks.

2.8 Software Power-up

Guides users through the software startup process, including logging into Windows NT and starting NanoScope.

Chapter 3 Facilities Requirements

3.1 Optional Configurations

Describes typical system configurations like VT-103-3K with ELCON, VT-102, and IS3K-2.

3.2 Facilities Requirements

Outlines the general facility requirements for installing and operating the Dimension 3100 SPM.

3.3 Acoustic/Vibration Isolation Systems

Details requirements for acoustic and vibration isolation systems like IS3K-2 and VT-103-3K.

3.6 General Facilities Guidelines

Provides recommendations for environmental conditions, power, air, and vacuum for the Dimension 3100 system.

Chapter 4 Installation

4.1 Shipping and Receiving

Details the necessary equipment and procedures for receiving and inspecting the Dimension 3100 system.

4.3 Installing the Dimension 3100 System

Provides step-by-step instructions for installing the Dimension 3100 SPM unit and control station.

4.4 Connecting the Dimension 3100 System

Guides users through connecting the control station and microscope external components to the system.

4.5 System Power-up

Details the procedures for powering up the system after installation, including hardware and software steps.

Chapter 5 Stage System

5.1 Mounting of Samples

Explains methods for mounting samples using vacuum chucks and magnetic pucks on the stage.

5.2 Stage Menu Commands

Details essential stage control commands like Load New Sample, Locate Tip, and Initialize.

5.2.1 Load New Sample

Describes the procedure for loading or unloading a sample from the stage using the software.

5.2.7 Initialize

Explains how to initialize the stage to locate limit switches and reset coordinates for proper operation.

Chapter 6 Cantilever Preparation

6.1 Silicon Cantilever Substrates

Provides instructions for preparing silicon cantilever substrates, including using the wafer tool kit.

6.1.2 Cantilever Preparation

Details the steps for preparing cantilevers for imaging, including substrate removal and inspection.

6.1.3 Tip Shape of Etched Silicon Probes

Discusses the theoretical tip shapes of etched silicon probes and their effects on imaging.

6.2 Silicon Nitride Cantilever Substrates

Explains the procedure for removing silicon nitride cantilever substrates from the wafer.

Chapter 7 Head, Probe, & Sample Preparation

7.1 System Information

Covers essential system information including mouse vs trackball usage and motor interlocks.

7.2 Basic AFM Operation

Provides fundamental steps for AFM operation, including selecting microscope, mode, and preparing components.

7.2.9 Align Laser

Details the procedure for aligning the laser beam onto the cantilever for optimal imaging.

7.2.11 Locate Tip

Explains how to use the locate tip function to position the tip using optical focal distance measurements.

7.2.16 Engage

Describes the process of engaging the tip with the sample surface for AFM operation.

Chapter 8 Contact AFM

8.1 Basic Contact Mode AFM Operation

Covers fundamental operational procedures for Contact Mode AFM, including setup and alignment.

8.1.5 Adjust Photodetector

Guides users on adjusting the photodetector to center the laser spot for optimal signal detection.

8.1.9 Set Initial Scan Parameters

Details how to set initial scan parameters in the Scan Controls and Feedback Controls panels.

8.3 Optimization of Scanning Parameters

Discusses optimizing scan parameters like Data Type, Gain Settings, and Setpoint for Contact Mode AFM.

8.4 Force Calibration Mode

Explains how to use Force Calibration mode to check tip-sample interactions and determine optimal setpoints.

Chapter 9 TappingMode AFM

9.1 Principles of TappingMode

Explains the fundamental principles of TappingMode AFM, including cantilever oscillation and signal generation.

9.2 Basic TappingMode AFM Operation

Provides fundamental steps for TappingMode AFM operation, including setup and parameter adjustment.

9.2.7 Cantilever Tune

Details steps to find the cantilever's resonance peak and adjust oscillation amplitude for optimal imaging.

9.4 Advanced TappingMode AFM Operation

Discusses advanced TappingMode techniques like optimizing scan parameters and gain settings.

9.4.8 Surface Tune

Explains how to check and adjust cantilever tune after engaging for optimal image quality.

Chapter 10 Fluid Imaging

10.1 Basic Principles

Covers basic principles of fluid imaging, including advantages and similarities to air operation.

10.2 Fluid Operation Hardware

Details the specialized hardware for fluid imaging, including the fluid tip holder and protective skirt.

10.3 Sample Mounting

Provides notes on sample binding for AFM imaging, covering both large and small samples in fluid.

10.4 Precautions

Highlights crucial precautions for fluid imaging, especially spillage and handling of the scanner.

10.5 Operating Principles

Details operating principles for fluid imaging, including cleaning, mode selection, and probe loading.

Chapter 11 Scanning Tunneling Microscopy (STM)

11.1 Introduction

Introduces STM, its reliance on tunneling current, and basic principles of operation.

11.2 Basic STM Operation

Explains how to perform STM imaging, including sample loading and setting scan parameters.

11.3 STM-Specific Information and Operations

Covers STM-specific details like operating modes, menu parameters, and optimization strategies.

11.5 Troubleshooting Operation of STM

Addresses common problems encountered during STM operation, including image issues and tip crashes.

Chapter 12 Lateral Force Mode

12.1 Introduction

Introduces Lateral Force Microscopy (LFM) for measuring frictional forces on sample surfaces.

12.2 Basic LFM Operation

Details the setup and basic operation of LFM, including scan parameters and line direction.

12.3 Advanced LFM Operation

Covers advanced LFM techniques like scan direction, tip selection, and understanding LFM signals.

12.3.4 Understanding the Color Scale

Explains the convention for LFM data visualization, where lighter colors mean higher friction.

12.3.6 Enhancing the LFM Data by Subtracting Two Images

Describes how to enhance LFM data by subtracting trace from retrace images for improved clarity.

Chapter 13 Force Imaging

13.1 Force Plots–An Analogy

Explains force plots using an analogy to measure magnet strength and understand tip-sample interactions.

13.2 Force Calibration Mode

Details Force Calibration mode for checking cantilever-sample interactions and setting optimal setpoints.

13.2.1 Example Force Plot

Provides an example of a Contact Mode AFM force plot and its interpretation.

13.3 Force Calibration Control Panels and Menus

Describes the parameters and menus used for controlling force calibration, including ramp and feedback controls.

13.4 Force Calibration (Contact Mode AFM)

Provides detailed instructions for obtaining and adjusting force curves in Contact Mode AFM.

Chapter 14 Interleave Scanning

14.1 Preface: Interleave Scanning & LiftMode

Introduces Interleave scanning and LiftMode, explaining their use for simultaneous data acquisition.

14.2 Interleave Mode Description

Describes how enabling Interleave alters the scan pattern for acquiring multiple data types concurrently.

14.3 LiftMode Description

Explains LiftMode, where the tip is lifted to measure far-field forces while minimizing topography influence.

14.4 Operation of Interleave Scanning / LiftMode

Provides instructions for operating Interleave scanning and LiftMode across various AFM modes.

14.5 Use of LiftMode with TappingMode

Discusses additional considerations for using LiftMode with TappingMode, including parameter selection.

Chapter 15 Magnetic Force Microscopy

15.1 Magnetic Force Microscopy

Introduces Magnetic Force Microscopy (MFM) and its principles, including force gradient detection.

15.1.1 Force Gradient Detection

Explains how force gradients are detected via cantilever resonant frequency shifts in MFM.

15.2 Basic MFM Operation

Provides basic steps for MFM operation using Interleave and LiftMode, focusing on phase and amplitude.

15.2.1 MFM Using LiftMode

Details how to use LiftMode for MFM imaging, minimizing topography influence for better magnetic data.

15.3 Advanced MFM Operation

Covers advanced MFM techniques like fine-tuning interleave controls and adjusting drive amplitude.

Chapter 16 Electric Techniques

16.1 Electric Techniques Overview

Introduces Electric Force Microscopy (EFM) and Surface Potential Detection, similar to MFM procedures.

16.2 Electric Force Microscopy

Details the theory, preparation, and procedures for Electric Force Microscopy (EFM).

16.2.2 Electric Force Microscopy Preparation

Explains how to apply voltage to the tip or sample for generating electric fields using jumper configurations.

16.2.4 Phase Detection

Describes phase detection technique for EFM, available with Extender Electronics Module.

16.2.5 Frequency Modulation

Explains frequency modulation (FM) technique for quantitative measurement of resonant frequency shifts.

Chapter 17 Calibration

17.1 SPM Calibration Overview

Provides an overview of the software-guided calibration procedure for Dimension SPMs.

17.1.1 Theory Behind Calibration

Explains the theory of scanner calibration, including piezoelectric material behavior and sensitivity.

17.2 Calibration Setup

Details the steps for setting up calibration, including checking scanner parameters and aligning references.

17.3 Check Sample Orthogonality

Guides users on checking and adjusting the sample scan for X- and Y-axis orthogonality.

17.4 Linearity Correction

Provides procedures for optimizing linearity correction parameters for scanners, especially long-range ones.

Chapter 18 Maintenance, Troubleshooting and Warranty

18.1 Maintenance

Covers general maintenance for the Dimension 3100 system, including cleaning and calibration checks.

18.1.1 Cleaning

Details cleaning procedures for major components, SPM stage, optics, and scanner parts.

18.1.3 Changing the Illuminator Light Bulb

Provides instructions on how to change the illuminator light bulb, the only user-serviceable part.

18.1.4 Fuse Characteristics and Replacement

Lists fuse characteristics for NanoScope Controller, Illuminator, and Vacuum Pump boards.

18.2 Troubleshooting

Addresses common problems, alarms, and error messages encountered with the Dimension 3100 system.

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