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Veeco Dimension 3100 User Manual
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Document Revision History:
DImension 3100 Manual
Revision
Date
Section(s) Affected
Ref.
DCR
A
pproval
D
03/09/04
All.
N/A
C. K
owalski
C
05/15/03
Fluid Cell
N/A
L. Burro
ws
B
06/01/00
All.
313
A. V
arbel
A
08/25/97
Released.
N/A
M. Leilani
Copyright © [2004]
V
eeco Instruments Inc.
All rights reserved.
Dimension 3100 Manual
NanoScope Software
V
ersion 5
004-320-000 (standar
d)
004-320-100 (c
leanroom)
2
Table of Contents
Default Chapter
3
Table of Contents
3
System Overview
21
Chapter 1 System Overview
22
System Overview
22
Dimension 3100 SPM Features
22
Control Station Overview
23
Input and Display Devices
23
Figure 1.2A Dimension 3100 Input and Display Equipment
23
Computer
24
Figure 1.2B Computer (Rear View)
24
Nanoscope Iiia Controller
25
Figure 1.2C Nanoscope Iiia Controller (Front View)
25
Dimension 3100 Controller
26
Figure 1.2D Dimension 3100 Controller (Front View)
26
Dimension 3100 SPM Overview
27
Dimension 3100 Microscope Electronics Box
27
Figure 1.3A D3100 Microscope Electronics Box (Rear View)
28
Optics and Motors Overview
29
Stage System
29
Dimension SPM Head
29
Figure 1.3B Dimension SPM Head
30
Figure 1.3C Quad Photodetector Arrangement
31
Figure 1.3D Dimension Head Scanner
32
Cantilever Holder
33
Figure 1.3E Standard Cantilever Holder
33
Video Zoom Microscope
34
Figure 1.3F Fluid Cell Cantilever Holder
34
Sample Size & Handling
35
Applications
36
Facilities Specifications
36
Maintenance and Troubleshooting
36
Chapter 2 Safety
37
Safety
38
Safety Requirements
39
Figure 2.1A Safety Symbols Key
39
Safety Precautions
40
General Operator Safety
40
Microscope
43
Sample Safeguards
46
Ergonomics
46
Environmental Conditions
47
Equipment Safety Applications
47
Dimension 3100 SPM Facility Requirements
47
Power-Up Sequence (Installation and Service Only)
47
Figure 2.5A Dimension 3100 SPM Footprint
47
Pre Power-Up Checklist
48
Turn on the Dimension 3100 SPM (Service and Installation Only)
50
Power-Up Checklist (Service and Installation Only)
51
Power-Up Sequence (Normal Usage)
51
Prepare the System for Power-Up (Normal Usage)
51
Power-Up Checklist (Normal Usage)
52
Software Power-Up
52
Log into Windows NT
52
Log on
53
Figure 2.8A Log into Windows NT
53
Start the Nanoscope Software
54
Select Realtime
54
Figure 2.8B Logon Window
54
Figure 2.8C Select the Nanoscope Icon
54
Figure 2.8D Select the Realtime Icon
54
Begin Stage Initialization
55
Software Power-Up Checklist
55
Hazard Labels
55
Figure 2.8E Status Panel
55
Figure 2.9A Laser Explanatory Label
56
Figure 2.9B Laser Warning Label
56
Figure 2.9C Noninterlocked Protective Housing Label
56
Laser Warning Labels
56
Chapter 3 Facilities Requirements
57
Optional Configurations
58
VT-103-3K with ELCON
58
Figure 3.1A VT-103-3K with ELCON
58
Figure 3.1B VT-102
59
Is3K-2
60
Figure 3.1C IS3K-2
60
Facilities Requirements
61
Figure 3.2A Dimension 3100 SPM Facility Requirements
61
Acoustic/Vibration Isolation Systems
62
IS3K-2 Dimensions, Utilities, and Clearance
62
Figure 3.3A IS3K-2 - Front View
62
Figure 3.3B IS3K-2 - Side View
63
Figure 3.3C IS3K-2 - Top View
63
Figure 3.3D IS3K-2 Leveling Feet Location - Bottom View
64
Figure 3.3E IS3K-2 Footprint Requirements - Top View
64
VT-103-3K Dimensions, Utilities and Clearance
65
Figure 3.3F VT-103-3K - Front View
65
Figure 3.3G VT-103-3K - Side View with Acoustic Hood Open and Closed
65
Dimensions and Utilities
66
Figure 3.3H VT-103-3K - Top View with Acoustic Hood Closed
66
Figure 3.3I VT-102 Vibration Isolation Table
66
Computer/Controller Facility Requirements
67
Figure 3.3J SPM Control Electronics Footprint
67
ELCON Console
68
Figure 3.3K Optional ELCON Console
68
Facilities Requirements Summary
69
Acoustic/Vibration Specifications
70
Figure 3.5A Vibration Criteria Plot
70
General Facilities Guidelines
71
Installation
73
Chapter 4 Installation
74
Shipping and Receiving
74
Equipment Requirements
74
Uncrating the System
76
Uncrate the Dimension 3100 SPM System
76
Installing the Dimension 3100 System
77
Install the Dimension 3100 SPM Unit
77
Figure 4.3A Hardware for Chuck Securement to Stage
77
Figure 4.3B Secure the Chuck to the Stage
78
Install the Control Station
79
Figure 4.3C Dimension 3100 Input and Display Equipment
79
Connecting the Dimension 3100 System
80
Dimension 3100 Control Station Connections
80
Figure 4.4A Computer (Rear View)
81
Figure 4.4B Nanoscope Iiia Controller (Front View)
83
Figure 4.4C Nanoscope Iiia Controller (Rear View)
83
Figure 4.4D Dimension 3100 Controller (Rear View)
84
Figure 4.4E Dimension 3100 Controller (Front View)
85
Dimension 3100 Microscope External Components Connections
86
Figure 4.4F D3100 Microscope Electronics Box (Rear View)
86
Figure 4.4G Vacuum Power Switch
87
Figure 4.4H Cable Clamp
87
System Power-Up
88
Chapter 5 Stage System
89
Mounting of Samples
90
Vacuum Chucks
90
Magnetic Pucks
90
Axis Orientation Motorized X-Y Stages
91
Figure 5.1A Stage X-Y Axis Orientation
91
Stage Menu Commands
92
Load New Sample
92
Figure 5.2A Stage Load/Unload Prompt
92
Locate Tip
93
Figure 5.2B Moving to Tip Position Caution
93
Focus Surface
94
Figure 5.2C Locate Tip Prompt
94
Figure 5.2D Focus Surface Prompt
95
Move to (X,Y)
96
Figure 5.2E Move to Prompt
96
Figure 5.2F Abort Motion Prompt
96
Set Reference
97
Figure 5.2G Set Reference Prompt
98
Figure 5.2H Defining the X-Axis
98
Programmed Move
99
Figure 5.2I Resultant Reference Line
99
Figure 5.2J Programmed Move Prompt
99
Figure 5.2K Editing or Creating New Program Prompts
100
Figure 5.2L Teach Program Prompt
100
Figure 5.2M Teach Mode Prompt
101
Initialize
103
Figure 5.2N Initial Focus Prompt
103
Figure 5.2O Programmed Move Prompt
103
Figure 5.2P Stage Initialize/Cancel Prompt
104
Figure 5.2Q SPM Move to Lower Limits Prompt
104
Figure 5.2R Stage Initializing Prompt
104
Figure 5.2S Optics Move to End of Travel Prompt
104
Figure 5.2T Stage Zoom Prompt
104
SPM Parameters
105
Figure 5.2U Stage Zoom out Prompt
105
Chapter 6 Cantilever Preparation
107
Silicon Cantilever Substrates
108
Wafer Tool Kit
108
Cantilever Preparation
108
Figure 6.1A Silicon Cantilever Substrates in Wafer
109
Tip Shape of Etched Silicon Probes
110
Figure 6.1B Theoretical Tip Shape of Silicon Probes
110
Figure 6.1C Silicon Probe Tip Profile Artifact (Front-To-Back)
111
Figure 6.1D Silicon Probe Tip Step Profile Artifact (Side-To-Side)
112
Figure 6.1E Common Silicon Probe Profile (Resultant Scan Artifact)
112
Silicon Nitride Cantilever Substrates
113
Figure 6.2A Silicon Nitride Cantilevers in a Wafer
113
Figure 6.2B Substrate Break-Off
115
Figure 6.2C Silicon Nitride Cantilevers
116
Tip Shape of Silicon Nitride Probes
116
Figure 6.2D Silicon Nitride Cantilevers (Profile)
117
Chapter 7 Head, Probe, & Sample Preparation
119
System Information
120
Mouse Versus Trackball
120
Motor Interlock
120
Laser Requirements
121
Basic AFM Operation
122
Select the Microscope
122
Select Mode of Operation
122
Prepare the Cantilever Holder
122
Figure 7.2A Microscope Select Prompt
122
Load the Cantilever Holder
123
Figure 7.2B Cantilever Holder Stand (Top View)
123
Figure 7.2C Standard AFM Cantilever Holder
124
Remove the Dimension SPM Head
125
Install the Cantilever Holder
125
Figure 7.2D SPM Head Dovetail and Signal Connector
125
Replace the Dimension SPM Head
126
Connect the Dimension Head
126
Align Laser
126
Figure 7.2E Dimension Head Laser Control Knobs
127
Figure 7.2F Etched Silicon Tip Laser Alignment
128
Figure 7.2G Photodetector Adjustment Knobs
129
Figure 7.2H Silicon Nitride Laser Alignment
130
Adjust Photodetector
131
Figure 7.2I Vision System Window
132
Locate Tip
133
Figure 7.2J Photodetector Mirror Adjustment Knobs
133
Load the Sample
134
Figure 7.2K Securing Double-Sided Tape to the Sample Disk
134
Focus Surface
135
Figure 7.2L Securing the Sample
135
Cantilever Tune (Tappingmode Only)
136
Set Initial Scan Parameters
136
Engage
137
Withdraw
137
Advanced AFM Operation
137
Stage Parameters
137
Figure 7.3A Default SPM Stage Parameters
138
Chapter 8 Contact AFM
139
Basic Contact Mode AFM Operation
140
Select the Microscope
140
Select Mode of Operation
140
Head, Cantilever and Sample Preparation
140
Align Laser
140
Adjust Photodetector
141
Locate Tip
141
Focus Surface
141
Show All Items
142
Figure 8.1A Select Show All Items
142
Figure 8.1B Enable Parameters
142
Set Initial Scan Parameters
143
Figure 8.1C Suggested Scan Controls Settings
143
Figure 8.1D Suggested Other Controls Settings
143
Figure 8.1E Suggested Feedback Controls Settings
144
Figure 8.1F Suggested Channel Controls Settings
144
Engage
145
Advanced Atomic Force Operation
145
Cantilever Selection
145
Figure 8.2A Force Curve
146
Optimization of Scanning Parameters
147
Data Type
147
Gain Settings
148
Scan Size and Scan Rate
149
Setpoint
149
Lowpass Filter
149
Highpass Filter
149
Force Calibration Mode
150
Chapter 9 Tappingmode AFM
151
Principles of Tappingmode
152
Figure 9.1A Tapping Cantilever in Free Air
152
Basic Tappingmode AFM Operation
153
Select Mode of Operation
153
Figure 9.1B Tapping Cantilever on Sample Surface
153
Head, Cantilever and Sample Preparation
154
Align Laser
154
Adjust Photodetector
154
Locate Tip
154
Focus Surface
155
Cantilever Tune
155
Figure 9.2A Auto Tune Control Panel
156
Figure 9.2B Cantilever Tune Control Panels for Main Controls
157
Figure 9.2C Cantilever Tune Frequency Sweep
158
Show All Items
159
Figure 9.2D Select Show All Items
159
Figure 9.2E Enable Parameters
159
Set Initial Scan Parameters
160
Figure 9.2F Suggested Scan Controls Settings
160
Figure 9.2G Suggested Other Controls Settings
160
Engage
161
Figure 9.2H Suggested Feedback Controls Settings
161
Optimize Scan Parameters
162
Withdraw the Tip
162
Advanced Tappingmode AFM Operation
163
Resonating Techniques
163
Cantilever Oscillation
163
Figure 9.4A Cantilever Response Curve
163
Figure 9.4B Scope Trace with High Scan Rate
164
Decreasing the Cantilever Drive Frequency
165
Figure 9.4C Scope Trace with Correct Scan Rate
165
Figure 9.4D Suggested Range of Drive Frequencies
165
Optimization of Scanning Parameters
166
Data Type
166
Gain Settings
166
Scan Size, Scan Rate, and Setpoint
166
Surface Tune
167
Troubleshooting
168
Frequency Response Plot
168
Engaging the Sample
168
Cantilever will Not Tune
168
Chapter 10 Fluid Imaging
169
Basic Principles
171
Acknowledgments
171
Fluid Operation Hardware
171
Fluid Tip Holder
171
Tip Suggestions
172
Figure 10.2A Fluid Tip Holder
172
Rubber Protective Skirt
173
Sample Mounting
173
General Notes on Sample Binding
173
Figure 10.2B Rubber Protective Skirt
173
Larger Samples
174
Smaller Samples
174
Figure 10.3A Imaging a Sample Covered by a Drop of Fluid
174
Precautions
175
Spillage Precautions
175
Operating Principles
177
Clean Fluid Cell and Protective Skirt
177
Select Mode of Operation
177
Load the Probe
177
Install the Fluid Tip Holder
178
Install the Protective Skirt
179
Align Laser
179
Figure 10.5A Tip Holder Installed with Protective Skirt
179
False Reflections
180
Load Sample
180
Figure 10.5B False Reflections from Fluid Tip Holder
180
Lower Probe into Fluid
182
Readjust Laser Alignment
182
Adjust Photodetector
182
Locate Tip
183
Focus Surface
183
Cantilever Tune (Tappingmode Only)
185
Figure 10.5D Cantilever Tune Control Panels for Main Controls
187
Figure 10.5E Cantilever Tune Frequency Sweep
188
Show All Items
189
Figure 10.5F Select Show All Items
189
Figure 10.5G Enable Parameters
189
Set Initial Scan Parameters
190
Figure 10.5H Suggested Scan Controls Settings During Tappingmode
190
Engage
191
Adjust Scan Parameters
191
Clean Cell and Protective Skirt
192
Troubleshooting
193
Cantilever Tune Plot Looks Poor
193
Laser Sum Signal Absent or Weak
193
Poor Image Quality
193
Unable to Locate Particulate Samples
194
Chapter 11 Scanning Tunneling Microscopy (STM)
195
Introduction
196
Overview of STM
196
Basic STM Operation
197
Imaging Samples
197
Figure 11.1A Dimension Tip Holder and Head Connection
197
STM-Specific Information and Operations
200
STM Hardware
201
Fine Points of STM Operation
202
STM Operating Modes
202
Figure 11.3A Typical STM Channel 1 Control Panel Parameters
202
STM-Specific Menu Parameters
203
Figure 11.3B Scan Derating Graph
206
Spectroscopy with the STM
207
Operation of STS
207
Troubleshooting Operation of STM
208
Head and Microscope-Related Problems
208
Head Engages Immediately
209
Etching Tungsten Tips
212
Procedure
212
Chapter 12 Lateral Force Mode
215
Introduction
215
Basic LFM Operation
216
Advanced LFM Operation
217
Scan Direction
217
Figure 12.3A Scan Angle Selection
217
Tip Selection
218
Understanding the LFM Signal
218
Understanding the Color Scale
219
Figure 12.3C Friction Data
219
Using TMR Voltage to Measure Friction
220
Enhancing the LFM Data by Subtracting Two Images
220
Figure 12.3D TMR Data
220
Height Artifacts in the Signal
221
Figure 12.3E Height Artifacts in LFM Data
221
Chapter 13 Force Imaging
223
Force Plots-An Analogy
224
Figure 13.1A Comparative Index of Pulling Forces
225
Figure 13.1B Pulling Forces Graph
225
Force Calibration Mode
226
Figure 13.2A Force Calibration Z Waveform
226
Figure 13.2B Piezo Travel in Force Calibration Mode
227
Figure 13.2C Tip-Sample Interaction During a Force Plot
228
Example Force Plot
229
Figure 13.2D Anatomy of a Force Curve
230
Force Calibration Control Panels and Menus
232
Figure 13.3A Advanced Force Calibration Control Window (Contact Mode AFM)
232
Main Controls (Ramp Controls)
233
Main Controls Panel (Display)
234
Channel 1, 2, 3 Panels
235
Feedback Controls Panel
236
Figure 13.3B Absolute and Relative Triggers
237
Scan Mode Panel (Advanced Mode Only)
237
Menu Bar Commands
239
Force Calibration (Contact Mode AFM)
240
Obtaining a Good Force Curve
240
Figure 13.4A Typical Force Calibration Curve
240
Figure 13.4B Piezo Positions for Typical Force Curve
240
Helpful Suggestions
242
Figure 13.4C False Engagement (G Scanner)
242
Advanced Techniques
243
Figure 13.4D Set the Sensitivity Parameter
243
Figure 13.4E Computing Contact Force
245
Interpreting Force Curves
247
Figure 13.4F Force Curve Examples
247
Force Calibration (Tappingmode)
248
Force Plots
248
Figure 13.5A Piezo Extension Versus RMS Amplitude and Deflection
249
Obtaining a Force Plot (Tappingmode)
250
High Contact Force
252
Tip Selection
252
Figure 13.5C Amplitude Force Plot with High Contact Force
252
Force Modulation
253
Introduction
253
Figure 13.6A Contrast Generation in Force Modulation Mode
253
Selecting a Force Modulation Tip
254
Figure 13.6B Force Modulation Cantilever Holder
254
Operating Principle
255
Force Modulation Procedure
255
Figure 13.6C Auto Tune Controls Panel
257
Figure 13.6D Typical Frequency Sweep Plot
257
Figure 13.6E Correctly Tuned Force Modulation Frequency
258
Notes about Artifacts
261
Figure 13.6F Friction on Force Modulation Images
262
Force Modulation with Negative Liftmode
263
Set Interleave Controls
263
Obtain a Tappingmode Image
264
Obtain a Negative Liftmode Force Modulation Image
264
Force Volume
265
Interleave Scanning
267
Chapter 14 Interleave Scanning
268
Preface: Interleave Scanning & Liftmode
268
Figure 14.2A X-Y Scan Pattern
269
Interleave Mode Description
269
Figure 14.3A Liftmode Profiles
270
Liftmode Description
270
Operation of Interleave Scanning / Liftmode
270
Use of Liftmode with Tappingmode
271
Main Drive Amplitude and Frequency Selection
271
Setpoint Selection
272
Interleave Drive Amplitude and Frequency Selection
272
Amplitude Data Interpretation
273
Cantilever Oscillation Amplitude
273
Chapter 15 Magnetic Force Microscopy
275
Magnetic Force Microscopy
276
Force Gradient Detection
276
Figure 15.1A MFM Liftmode Principles
276
Amplitude Detection Techniques
277
Basic MFM Operation
278
MFM Using Liftmode
278
Magnetic Force Microscopy Procedure
279
Figure 15.2B Shift in Phase at Fixed Drive Frequency
280
Figure 15.2C Cantilever Tune for Amplitude Detection
281
Figure 15.2D Shift in Amplitude at Fixed Drive Frequency
281
Advanced MFM Operation
284
Lift Scan Height and Magnetic Imaging Resolution
284
Fine Tuning Interleave Controls
285
Drive Amplitude
285
Figure 15.3A High-Resolution Magnetic Force Gradient Image
285
Figure 15.3B Tip Height and Oscillation Amplitudes (Tappingmode & Liftmode)
287
Installation of the Electronics Modules
288
Phase Extender Module
288
Figure 15.4A Phase Box
288
Quadrex Extender
289
Nanoscope IV
289
Software Setup Configuration (Phase, Quadrex or NSIV)
289
Figure 15.5A Microscope Select Dialog Box
289
Troubleshooting
290
MFM Image Verification
290
Saturation in Amplitude Detection
290
Optical Interference
290
Chapter 16 Electric Techniques
291
Electric Techniques Overview
293
Electric Force Microscopy Overview
293
Figure 16.1A Liftmode Principles
293
Surface Potential Imaging Overview
294
Figure 16.1B Extender Electronics Module
294
Electric Force Microscopy
295
Electric Force Microscopy Theory
295
Figure 16.2A Comparison of Attractive and Repulsive Forces
295
Electric Force Microscopy Preparation
296
Figure 16.2B Diagram of Extender Electronics Module for EFM
296
Figure 16.2C Microscope Backplane
297
Figure 16.2D Toggle Switches on Extender Electronics Module
299
Figure 16.2E Normal Jumper Configuration
300
Figure 16.2G Jumper Configuration (Application of Analog 2 Voltage to Sample)
302
Figure 16.2H Jumper Configuration for Applying External Voltage to Tip
303
Figure 16.2K Jumper Configuration for Application of Voltage to Tip
306
Figure 16.2L Jumper Configuration for Application of Voltage to Sample
307
Figure 16.2M Jumper Configuration for Applying External Voltage to Tip
308
Electric Force Microscopy Procedures
310
Phase Detection
311
Figure 16.2O Phase Detection Cantilever Tune (Extender Electronics Module Installed)
311
Figure 16.2P Shift in Phase at Fixed Drive Frequency
311
Frequency Modulation
313
Amplitude Detection
313
Figure 16.2Q Shift in Amplitude at Fixed Drive Frequency
313
Figure 16.2R Amplitude Detection Cantilever Tune
314
EFM Troubleshooting/Pointers
315
Use Low Setpoint When Tapping in Electric Field
315
Verify Electric Field at Surface
315
Fine Tune Lift Scan Height
315
Fine Tune Interleave Drive Amplitude
315
Optimize Tune in Vicinity of Surface
315
Optimize Tune in Interleave
316
If Voltage Is Needed, Use Analog 2 When Possible
316
Try Uncoated si Tip
316
Surface Potential Detection Theory
316
Surface Potential Detection-Theory
316
Figure 16.4A Simplified Block Diagram of Basic Extender Module in Surface
317
Surface Potential Detection Preparation
318
Applying Voltage to the Sample Directly
318
Surface Potential Detection-Preparation
318
Figure 16.5B Jumper Configuration for Application of Voltage to Tip
319
Figure 16.5C Jumper Configuration for Application of Voltage to Sample
320
Surface Potential Imaging Procedure
321
Figure 16.6A Toggle Switches on Back of Basic Extender Module
321
Surface Potential Imaging-Procedure
321
Troubleshooting the Surface Potential Feedback Loop
324
Chapter 17 Calibration
325
SPM Calibration Overview
327
Theory Behind Calibration
328
Figure 17.1A Scanner Crystal Voltage and Photodiode Voltage
329
Figure 17.1B Scanner Sensitivity Curve
330
Figure 17.1C Effect of Nonlinearity and Hysteresis
330
Figure 17.1D Scanner Voltage and Movement
331
Calibration References
332
Calibration Setup
332
Check Scanner Parameter Values
332
Figure 17.1E Silicon Calibration Reference
332
Align Calibration Reference
333
Set Realtime Parameters
333
Figure 17.2A 0 Degrees Scan Angle
333
Set up Contact AFM
334
Check Sample Orthogonality
334
Measure Orthogonality
334
Figure 17.3A Non-Orthogonal and Corrected, Orthogonal Image
334
Adjust Sample Orthogonality
335
Linearity Correction
336
Adjust Mag0 and Arg
336
Figure 17.4A Fast Scan Linearization: Mag0
337
Figure 17.4B X Scan Linearization
337
Figure 17.4C y Scan Linearization
338
Adjust Fast Mag1
339
Adjust Slow Mag1
340
X-Y Calibration Using Capture Calibration and Autocalibration
341
Capture Calibration
341
Figure 17.5A Capture Calibration Prompt
341
Figure 17.5B Capture Control Prompt
342
Figure 17.5C Improved Calibration Image
342
Autocalibration
343
Figure 17.6A X-Y Piezo Calibration Prompt
343
Figure 17.6B Vertical Calibration Line
344
Figure 17.6C Calibration Line Distance Prompt
344
Fine-Tuning for X-Y Calibration
346
Prepare System for Fine-Tuning
346
Measure Horizontally at 440V Scan Size
346
Figure 17.7A Calibration Horizontal Reference
347
Figure 17.7B Scanner Calibration Panel
347
Measure Vertically at 440V Scan Size
348
Measure Horizontally at 150 V Scan Size
349
Measure Vertically at 150V Scan Size
350
Change Scan Angle and Repeat Calibration Routines
350
Calibrating Z
351
Engage
351
Figure 17.8A Z Calibration Image
351
Capture and Correct an Image
352
Figure 17.8B Draw a Stopband
352
Measure Vertical Features
353
Figure 17.8C Depth Analysis Screen
353
Figure 17.8D Draw a Cursor Box
353
Figure 17.8E Z Calibration Configure Dialog Box
354
Figure 17.8F Z Calibration Depth Dialog Box
354
Correct Z Sensitivity
355
Recheck Z-Axis Measuring Accuracy
355
Calculate Retracted and Extended Offset Deratings
355
Chapter 18 Maintenance, Troubleshooting and Warranty
357
Maintenance
358
Cleaning
358
Calibration
360
Changing the Illuminator Light Bulb
361
Figure 18.1A Change the Illuminator Bulb
361
Fuse Characteristics and Replacement
363
Air Tables
364
Air Pressure
364
Air Table Feet
364
Optics Zoom System
365
Troubleshooting
366
Alarms and Error Messages
366
Common Problems
368
Warranty
369
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Veeco Dimension 3100 Specifications
General
Brand
Veeco
Model
Dimension 3100
Category
Microscope
Language
English
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