Veeco MS40 - 5.3 Other Components; VACUUM SYSTEM Components

5.3 Other Components
Refer to figures 5-1 and 5-2 for exploded views of the MS-40 Vacuum
System and Valve Block, respectively. The numbered parts in each
illustration are listed, along with their VIC part number and a brief description,
in the accompanying tables.
TABLE 5-1
VACUUM SYSTEM
ITEM # VIC P/N DESCRIPTION
1 0137-203-00 Test Port
2 0011-120-00 O-ring, Test Port Manifold
3 Commercial Screw, #10-32 x 7/16”
Commercial Lock washer, #10
4 ----------- Valve Block Assembly
5 1620-735-00 Elbow, 1/4” NPT, M/F
6 0137-702-00 Pirani Gauge, Fore-line
7 0137-206-00 Manifold, Fore-line
0011-115-00 O-Ring, Turbo-molecular Pump Fore-line
8 1621-239-02 Clamp, VF16
9 1621-231-12 Centering Ring, VF16
10 1660-253-00 Turbo-molecular Pump
11 1621-150-00 Centering Ring, ISO 63
12 1331-527-00 Claw Clamp
13 0137-214-00 Manifold, High Vacuum
14 1621-239-02 Clamp, VF16
15 1621-231-12 Centering Ring, VF-16
16 Commercial Screw, #10-32 x 7/16”
Commercial Lock-washer, #10
17 0011-119-00 O-Ring, High Vacuum Manifold
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C 5-5