Veeco MS40 - 1.4 Features & Specifications

Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1.4 Features & Specifications
FEATURES
Sensitivity: 4 x 10
-11
std cc/sec air equivalent
Leak Rate Range: 10 to 4 x 10
-11
std cc/sec air equivalent
(with optional external pump)
10 x 10
-4
to 4 x 10
-11
std cc/sec air equivalent
(without external pump)
Start-Up: Fully functional in less than 3 minutes. Consists of:
Turbo-molecular pump acceleration, a complete set
of self-diagnostics, turning on filament, checking
and assuring Hi-Vac status, measuring system
offsets and measuring background helium
Internal Calibrator: Helium 4, 1 x 10
-8
to 3 x 10
-8
std cc/sec air
equivalent with integral solenoid valve
Testable Masses: Helium Mass 3 or 4
Tuning: Automatic
Calibration: Automatic for Helium 4 using an internal calibrator
of 1 x 10
-8
to 3 x 10
-8
std cc/sec air equivalent
Auto Zero: Automatic zeroing of leak rate while in test mode
initiated by pressing the ZERO pushbutton
Background Continuous automatic compensation for system back
Compensation: ground
Remote Control Molded A.B.S. plastic laminate over tactile
Unit: membrane switch array Controls similar to User
Panel
RS-232C Port: Two standard bi-directional ports. One port
dedicated to the remote control unit. The second
port is dedicated to data transfer to an external
computer or control module.
1109-186-00 Rev. C 1-8