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Veeco MS40 - Page 12

Veeco MS40
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Vacuum Instrument Corp.
Vacuum Instrument Corp.
2099 Ninth Avenue
2099 Ninth Avenue
Ronkonkoma, NY 11779
Ronkonkoma, NY 11779
631.737.0900
631.737.0900
Ranging: Without an external roughing pump, begins at the
[Automatic/Standard least sensitive gross range (10
-4
). The unit ranges
Mode] downward until a leak is detected or until it reaches
its most sensitive range (10
-10
). With the optional
external pump, if a gross leak is detected, the unit
ranges up to the appropriate decade. If a gross leak
is not detected the unit ranges downward until a leak
is detected or until it reaches its most sensitive
range.
Ranging: May operate at any range, selectable by the operator.
[Manual Mode] The 10
0
to 10
-3
range is only available when the
optional external pump has been installed.
Measurement Units: Pressure: millitorr or millibar (selectable with a
switch located underneath the Service Panel accessible
when the unit’s front panel has been opened)
Leak Rate: std cc/sec (standard cubic centimeters/
second) or mbar l/sec (millibar liters/second)
PUMPS
Mechanical Pump: Internal 1.5 CFM dual stage rotary vane pump
Turbo Pump: 60 liter/second turbo-molecular pump
External Pump: Optional 7 or 16 CFM dual stage rotary vane
(Mechanical pump)
PERFORMANCE SPECIFICATIONS
Sensitivity: 4 x 10
-11
Std cc/sec air equivalent (direct mode)
4 x 10
-10
Std cc/sec air equivalent (reverse mode)
Resolution: 14 at Mass 4
Response Time: Reverse Mode < 3 seconds
Fine Mode < 2 seconds
Test Time: <2.5 seconds on a blank port to a pre-selected range
in the reverse flow test mode
1109-186-00 Rev. C 1-9