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Veeco MS40 - Page 13

Veeco MS40
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Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Noise & Drift: <4% on 10
-10
range
Testable Masses: 3 and 4
Maximum 10 x 10
-4
std cc/sec air equivalent (without external
Measurable Leak: pump) 10 std cc/sec air equivalent (with optional
external pump)
Maximum Inlet Gross Mode: Atm (with optional external pump)
Pressure: Reverse Mode: 7.5 Torr
Direct Mode: 100 mTorr
Test Mode Leak Gross: 10 to 1 x 10
-3
std cc/sec helium
Reverse: 10 x 10
-4
to 6 x 10
-10
Direct: 10 x 10
-5
to 6 x 10
-11
ELECTRONICS & USER INTERFACE
System Controller: Microprocessor based; four integrated boards used:
A controls the unit’s computer, logic and sensors
B
controls the unit’s mass spectrometer voltage supplies
C controls the unit’s displays and controls
D controls the unit’s handheld remote
Display: Green LED alphanumeric and bar graph
displays
Data Input: Through dedicated function keys
MISCELLANEOUS
Power Requirements: 115V, 60Hz, 10 Amp
230-240V, 50Hz, 5 Amp
100V, 50Hz, 10 Amp
100V, 60Hz, 10 Amp
Dimensions: 15.5”H x 20.5”W x 14.25”D
Weight: 84.5 lbs.
1109-186-00 Rev. C 1-10