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Veeco MS40 User Manual

Veeco MS40
169 pages
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Veeco MS40 Specifications

General IconGeneral
BrandVeeco
ModelMS40
CategorySecurity Sensors
LanguageEnglish

Summary

Chapter 1 General Information

1.1 Introduction

Provides an overview of the MS-40 Operations & Maintenance Manual.

1.2 Unpacking & Inspection

Instructions for safely unpacking and inspecting the MS-40 leak detector.

1.3 Installation

Details the requirements and procedures for properly installing the MS-40.

1.4 Features & Specifications

Lists the technical features and specifications of the MS-40 leak detector.

1.5 General Description

Provides a general overview of the MS-40's capabilities and modes of operation.

Standard Operation

Describes the normal operating procedures for the MS-40 user panel and controls.

Service Mode

Explains how to enter and the purpose of the Service Mode for advanced operations.

Chapter 2 Operating the MS-40

2.1 Introduction

Introduces the chapter on operating the MS-40 and its sections.

2.2 Operator Controls & Indicators

Details the function of each control and indicator on the MS-40 user panel.

2.3 Starting the MS-40 Leak Detector

Outlines the procedure for starting up the MS-40 and its self-diagnostic sequence.

2.4 Leak Testing

Explains the process of performing leak tests using the MS-40.

2.5 Operation With an External Pump

Describes how to operate the MS-40 with an external pump for enhanced performance.

2.6 Shut Down Procedure

Details the correct procedure for safely shutting down the MS-40 unit.

2.7 Setting Test Parameters

Explains how to adjust various test parameters to optimize leak detection.

Setting Crossover 1

Describes how to set the pressure point for switching between gross and reverse modes.

Setting Crossover 2

Describes how to set the pressure point for switching between reverse and direct modes.

Setting the Accept/Reject Point

Explains how to define the leak rate threshold for accept/reject indications.

Delay Settings (Valve Timing Settings)

Details how to adjust time intervals for valve operations to customize test cycles.

2.8 Setting Additional Parameters

Covers the adjustment of advanced parameters like Amplifier Gain.

Amplifier Gain

Explains how to set amplifier gain for compensating sensitivity changes during calibration.

2.9 Test Aids & Procedures

Covers useful tools and procedures like Auto Zero and Peak Scan.

Peak Scan

Describes the Peak Scan function for verifying spectrometer tuning.

Calibration Check (Cal-Check)

Explains the Cal-Check function to verify measurement accuracy.

Tune

Details the Auto Tune procedure for optimizing mass spectrometer performance.

Chapter 3 Theory of Operation

3.1 Introduction: Leak Detection Theory

Explains fundamental principles of leak detection and standards for permissible leakage.

3.2 Direct Flow & Reverse Flow Modes

Describes the operational theory behind Direct Flow and Reverse Flow modes.

Direct Flow Mode

Explains the Direct Flow mode for high sensitivity and clean testing.

Reverse Flow Mode

Explains the Reverse Flow mode for high out-gassing or fast crossover testing.

3.3 Functional Description of Operation

Details the functional steps of a basic test cycle, including vacuum system status.

3.4 Description of Major Components

Provides a breakdown of the MS-40's main sub-systems and components.

Mass Spectrometer

Describes the mass spectrometer's role in detecting and measuring helium tracer gas.

VALVE BLOCK ASSEMBLY

Lists and describes the components within the MS-40's valve block assembly.

PUMPS

Details the different types of pumps used in the MS-40 system.

Chapter 4 Service & Maintenance

4.1 Introduction

Introduces the chapter on MS-40 maintenance, contamination, and troubleshooting.

4.2 Service Mode

Explains how to enter and operate the unit in Service Mode for maintenance procedures.

4.3 Calibration & Tuning

Guides the user through automatic and manual calibration and tuning procedures.

4.4 Periodic Service

Outlines routine maintenance tasks required for the MS-40.

Grease Test Port O-ring

Details the procedure for inspecting and greasing the test port O-ring for proper sealing.

Check Oil Level in Internal and External Pumps

Instructions for checking the oil level and condition in the MS-40's pumps.

Changing the Oil in the Pumps

Provides step-by-step instructions for changing the oil in the unit's pumps.

4.5 Contamination of the Vacuum System

Discusses vacuum system contamination, its causes, effects, and indications.

Indications of Contamination

Lists symptoms that indicate potential contamination within the MS-40's vacuum system.

4.6 Venting the Vacuum System

Explains the critical procedure for safely venting the MS-40's vacuum system.

4.7 Cleaning Requirements

Details the procedures for cleaning contaminated components of the vacuum system.

Cleaning Procedure for Contaminated Parts

Outlines the steps for disassembling and cleaning affected vacuum system components.

4.8 Calibration Requirements

Specifies which components require calibration after service or replacement.

Test Port Pirani Calibration

Step-by-step guide for calibrating the test port Pirani gauge.

Fore-line Pirani Calibration

Step-by-step guide for calibrating the fore-line Pirani gauge.

4.9 General Service & Repair

Covers general service procedures and specific repair instructions for components.

Servicing the Valves

Explains how to service various valves in the MS-40, addressing common causes of leaks.

Replacing the Filaments

Provides instructions for replacing the filaments in the MS-40's mass spectrometer.

Circuit Board Replacement

Details the procedure for replacing the unit's circuit boards.

4.10 Troubleshooting Aids

Offers guidance on identifying and resolving system errors and faults.

CHAPTER FIVE Parts List

5.1 Introduction

Introduces the chapter detailing spare parts and component listings for the MS-40.

5.2 Recommended Spare Parts for the MS-40

Lists recommended spare parts with their VIC part numbers for the MS-40.

5.3 Other Components

Provides detailed listings of vacuum system and valve block components.

VACUUM SYSTEM Components

Lists components of the MS-40 vacuum system with part numbers and descriptions.

VALVE BLOCK ASSEMBLY Components

Lists components of the MS-40 valve block assembly with part numbers and descriptions.

APPENDIX A Glossary Of Terms Used In Leak Detection

Glossary Of Terms Used In Leak Detection

Defines key terms used in leak detection practices and the manual.

APPENDIX B A.V.S. Standards

AVS Standards for Mass Spectrometer Leak Detectors

Presents standards from the American Vacuum Society relevant to MS leak detector testing.

AVS Standard 2.1 Details

Details background, drift, and noise definitions relevant to leak detector calibration.

LEAKS and LEAK RATES

Defines various types of leaks and leak rate measurements.

SENSITIVITY TERMS

Defines terms related to leak detector sensitivity, including minimum detectable signal.

AVS Standard 2.3 Details

Covers standards related to scans, peak width, and resolution in mass spectrometry.

APPENDIX C Unit Conversion Tables

Unit Conversion Tables

Provides tables for converting between common units of pressure and leak rate.

Pressure Conversion Chart

A chart for converting pressure values between various units.

Leak Rate Conversion Chart

A chart for converting leak rate values between different units.

APPENDIX D Remote Port Specification

Full PC Remote Control Specification

Details the communication protocol and commands for remote PC control of the MS-40.

APPENDIX E Profile and Revision Switch Positions

Profile Switch Positions

Describes the function and settings of the profile switches on the MS-40.

Revision Switch Positions

Explains the function and settings of the revision switches on the MS-40.

APPENDIX F MS-40 Quick Reference

MS-40 User Control Panel Quick Reference

A quick reference guide to the functions and modes of the MS-40 User Control Panel.

MS-40 Service Panel Quick Reference

A quick reference guide to the functions and modes of the MS-40 Service Panel.

MS-40 Error Codes Quick Reference

A summary of MS-40 error codes, their descriptions, and suggested actions.

MS-40 Recommended Periodic Maintenance Quick Reference

A quick reference for recommended periodic maintenance tasks for the MS-40.