Veeco MS40 - Page 3

4.5 Contamination of the Vacuum System 4-8
VIC Leak Detectio
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
VIC Leak Detectio
n
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
4.6 Venting the Vacuum System 4-11
4.7 Cleaning Requirements 4-12
4.8 Calibration Requirements 4-19
4.9 General Service & Repair 4-21
4.10 Troubleshooting Aids 4-32
Section 5: Parts List
5.1 Introduction 5-1
5.2 Recommended Spare Parts for the MS-40 5-2
5.3 Other Components 5-5
Appendix A:
Glossary of Terms Used in Leak Detection
Appendix B:
A.V.S. Standards for Testing of Mass Spectrometer Leak Detectors
Appendix C:
Leakage Conversion Factors
Appendix D:
Remote Port Specifications
Appendix E:
Profile and Revision Switch Positions
Appendix F:
MS-40 Quick Reference
1109-186-00 Rev. A toc-ii