Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
Parts List for the MS-40 Mass Spectrometer (as illustrated in Figure 4-2):
ITEM # VIC P/N DESCRIPTION
1 0137-014-00 Source Assembly
2 0136-051-00 Collector Assembly
3 0011-037-00 O-Ring, 2 1/2 x 1/16
4 0137-011-00 Source Body
5 0135-053-00 Collector Body
6 0130-151-00 Magnet
7 Commercial Lock-washer, Split #4
8 Commercial Screw, #4-40 x 3/8
9 0130-195-00 Slit Plate
10 0130-168-00 Screw, vented, #2-56 x 3/16
11 0011-024-00 O-Ring, 1 1/8 x 1/16
12 Commercial Lock-washer, Split #6
13 Commercial Screw, Socket Head, #6-32 x 1/2
14 Commercial Lock-washer, Split #6
15 Commercial Screw, Socket Head, #6-32 x 1/2
Cleaning the Turbo-molecular Pump
Cleaning of this pump must be in accordance with the procedures
recommended by the manufacturer. These procedures are detailed in the pump
manufacturer’s manual that accompanies the MS-40. For questions regarding
servicing the turbo-molecular pump, contact the Customer Service Department
at Vacuum Instrument.
1. Vent the MS-40 (as stated in Section 4.6).
1109-186-00 Rev. C 4-17
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