Agilent Technologies TriScroll 600 Series - Cowling and Module Removal

TriScroll 600 Dry Scroll Vacuum Pump
TriScroli Disassembly (continued)
4. Remove th e three M5x16 screws that attach
t he cow ling to th e modul e.
5. Remove t he cow ling.
6. Re mo ve the four M6x16 sc rews thaL attach
th e pump module to the frame.
7. Remove pump module from the frame.
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