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General precautions for safe operation and maintenance of the product.
Details safety interlocks protecting operators and equipment.
Identifies hazards related to moving parts and unplanned motion.
Covers hazards related to electrical shock and proper grounding.
Addresses hazards associated with lifting and potential trip risks.
Provides details on noise, vibration, and hazardous materials.
Outlines the procedure for safely de-energizing equipment for maintenance.
Provides a general description of the MARATHON LEAP AX system.
Details the system's function as an EFEM for process and metrology tools.
Defines key terms and abbreviations used throughout the manual.
Describes the function and components of the load port modules.
Explains the interface used to interact with the system.
Details unit dimensions and typical configuration specifications.
Covers electrical system requirements and power cable details.
Lists requirements for vacuum, N2, and CDA connections.
Provides technical specifications for the Wafer Engine component.
Introduces basic adjustment and calibration instructions.
Details the steps for aligning mechanical components.
Provides procedures for teaching load port positions and movements.
Instructions for teaching the pre-aligner station using a fixture.
Reviews system operation and major subsystems.
Describes the recommended procedure for powering up the system.
Outlines the procedure for safely shutting down the system.
Explains the interlocks ensuring operator and service personnel safety.
Details the procedure for locking and tagging out the system.
Describes how to configure Vision LEDs on the front panel.
Information on the optional light tower for status indication.
Procedure for setting up the Wafer Engine camera for mapping.
Procedure for adjusting radial motor belt tension.
Procedure for adjusting XPS drive belt tension.
Instructions for inspecting and cleaning wafer contact surfaces.
Procedure for internal cleaning operations to minimize contamination.
Guidance on noting FRU part numbers and performance issues.
Steps for analyzing potential causes of diminishing performance.
Instructions for sending troubleshooting documents for revision.
Contains layout drawings of the MARATHON LEAP AX system.
Provides contact information for technical support.
General precautions for safe operation and maintenance of the product.
Details safety interlocks protecting operators and equipment.
Identifies hazards related to moving parts and unplanned motion.
Covers hazards related to electrical shock and proper grounding.
Addresses hazards associated with lifting and potential trip risks.
Provides details on noise, vibration, and hazardous materials.
Outlines the procedure for safely de-energizing equipment for maintenance.
Provides a general description of the MARATHON LEAP AX system.
Details the system's function as an EFEM for process and metrology tools.
Defines key terms and abbreviations used throughout the manual.
Describes the function and components of the load port modules.
Explains the interface used to interact with the system.
Details unit dimensions and typical configuration specifications.
Covers electrical system requirements and power cable details.
Lists requirements for vacuum, N2, and CDA connections.
Provides technical specifications for the Wafer Engine component.
Introduces basic adjustment and calibration instructions.
Details the steps for aligning mechanical components.
Provides procedures for teaching load port positions and movements.
Instructions for teaching the pre-aligner station using a fixture.
Reviews system operation and major subsystems.
Describes the recommended procedure for powering up the system.
Outlines the procedure for safely shutting down the system.
Explains the interlocks ensuring operator and service personnel safety.
Details the procedure for locking and tagging out the system.
Describes how to configure Vision LEDs on the front panel.
Information on the optional light tower for status indication.
Procedure for setting up the Wafer Engine camera for mapping.
Procedure for adjusting radial motor belt tension.
Procedure for adjusting XPS drive belt tension.
Instructions for inspecting and cleaning wafer contact surfaces.
Procedure for internal cleaning operations to minimize contamination.
Guidance on noting FRU part numbers and performance issues.
Steps for analyzing potential causes of diminishing performance.
Instructions for sending troubleshooting documents for revision.
Contains layout drawings of the MARATHON LEAP AX system.
Provides contact information for technical support.
General| Brand | Brooks |
|---|---|
| Model | MARATHON LEAP AX |
| Category | Laboratory Equipment |
| Language | English |
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