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MARATHON LEAP AX
Brooks MARATHON LEAP AX User Manual
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MARATHON LEAP AX
User Manual
Part Number 606712 Rev. A
2
Table of Contents
Table of Contents
6
Safety
11
Explanation of Hazards and Alerts
12
Safety Text
12
Safety Icons
12
Signal Words and Color
12
Alert Example
13
General Safety Considerations
14
Safety and Identification Labels
17
Interlocks
28
Shuttle Motion Interlock
28
Carrier Detection Interlock
29
Wafer Slide-Out Interlock
29
DIO Motion Interlock
29
Lockout/Tagout
31
Nitrogen Purge Interlock Trip Recovery
32
Location of Hazardous Points
34
Fire and Explosion Hazards
35
Asphyxiation Hazards
36
Mechanical Hazards
37
Electrical Hazards
39
Grounding
39
System Grounding Point
40
Ergonomics Hazards
41
Tip Hazard
41
Trip Hazard
42
Environmental Information
43
Noise Emission
43
Vibration
43
Recycling and Hazardous Materials
43
Personal Protective Equipment (PPE)
43
EMO Considerations
44
EMO Activation
44
Safety Precautions
44
Equipment Lockout/Tagout Procedure
45
Hardware Safety Interlock
48
Lockout/Tagout
49
Regulatory Compliance and Declaration of Incorporation
50
Safety Data Sheets
51
Overview
52
System Overview
52
General Usage Overview
53
N2 Purge Overview
54
Using this Manual
55
Concepts and Terminology
56
Product Illustration
57
Front Illustration
57
Rear Illustration
58
Right Side Illustration
59
Left Side Illustration
60
MARATHON LEAP Load Ports
61
Load Port Front View
61
Load Port Rear View
62
Shuttle
63
FIMS Door
66
Wafer Mapper (Optional)
68
Wafer Map Motors (Part of Wafer Mapper)
68
Door Drive Mechanism
69
N2 Purge
69
User Interface
69
Plumbing Architecture
70
N2 Flow
71
Flow Rate Specs
71
Specifications and Site Requirements
72
Specifications
72
Unit Dimensions
72
Space Requirements
72
Environmental Requirements
73
Power Specifications
74
Electrical System
74
Facilities Specifications
75
Network Interface Connections
76
Standard Ethernet IP Address and Serial Gateway Port Addresses
76
Wafer Engine Specifications
77
System Specifications
77
EC-6 Controller
78
Specifications
78
Installation
79
5. Alignment and Teaching
80
Overview
80
MARATHON LEAP AX System Alignment and Teaching
80
Required Tools and Test Equipment
81
Alignment Process
81
Adjust the Load Port Modules (Lpms)
83
Verify the Level of the Load Locks/Process Tool Handoff and Custom Modules
83
Adjust the End Effector(S)
84
Mount Tie-Down Brackets
84
Final Checkout
86
Procedure Category
86
Required Tools and Test Equipment
86
Checkout Procedure
86
End Effector Leveling-Validation
87
Aligner Leveling-Validation
87
Teaching Stations Overview
90
Scope
90
Prerequisites
90
Required Tools
91
Preparation
91
Teaching Load Port Hand Offs
92
Prerequisites
92
Required Tools
92
Preparation
92
Teaching the Load Port
92
Passive End Effector
96
Film Frame End Effector
97
300 MM Passive Edge Contact
98
Teach the Pre-Aligner Station with Fixture
100
Operation
104
Overview
104
Theory of Operation
105
Operation Overview
106
Block Diagrams
108
Station Naming System
108
Frame of Reference
109
System Frame of Reference
109
Wafer Engine Frame of Reference
110
Start-Up
111
Safe Shutdown
112
Safety Interlocks
115
Door Interlock Circuit
116
Emergency off (EMO) Circuit
116
System Lockout/Tagout Procedure
117
Remove System Lockout/Tagout
119
Wafer Engine Lockout/Tagout Procedure
119
Remove Wafer Engine Lockout/Tagout
120
Fan Filter Unit (FFU)
120
Description
121
Operational Interlocks
121
Facilities Panel
122
Facilities Panel Functions
123
Connections, Controls, and Indicators
123
Power Distribution Unit - PDU
125
PDU Functions
125
Load Port Swap Configuration Setup Procedure
127
Internal Lighting
130
Description
130
Configuring Leds
131
LED Front Panel
131
Visionled.config.xml Configuration File Structure
131
Configurable Leds and Non-Configurable Leds
132
Changing the Visionled.config.xml Configuration File
133
Setting the State of User-Defined Leds
137
Changing LED Colors
138
Vision MLP Leds Front Indicator Bezel
138
Leds Configuration Kit
139
Changing Colored Disks and Nameplates
140
Optional Ionizers
142
Description
142
Optional Optical Character Reading Mounting
143
Description
143
Optional Light Tower
144
Description
144
Theory of Operation
145
Optional SEMI E84 Interface
146
Description
146
Theory of Operation
147
Safety Interlocks
147
Optional Wafer Mapping
147
Description
147
Wafer Engine Camera Mapper Setup
148
7. Preventative Maintenance
159
PSP 1 Radial Motors Belt Tensioning
159
Required Tools
159
Pre-Service
160
Access the Mini-Environment
160
Remove Slide Body Cover
161
Verify Belt Tension
162
Attaching the Belt Tension Measurement Tool
163
Adjusting the Tension
164
Remove Belt Tension Measurement Tool
165
Post-Service
165
PSP 2 - XPS Drive Belt Tensioning
167
Required Tools
167
Pre-Service
167
Adjust the XPS Drive Belt Tension
168
Post-Service
171
PSP 3 - Periodic Inspection/Cleaning of All Wafer Contact Surfaces
172
Required Tools and Materials
172
Pre-Service
172
Clean/Inspect the Wafer Contact Surfaces
173
Post-Service
174
PSP 4 - Ionizer Inspection and Cleaning
174
PSP 5 - FFU Sensor Calibration
174
PSP 6 - Load Port Inspection and Cleaning
175
PSP 7 - Load Port APHD Module Inspection
177
PSP 8 - Internal Wipe out
179
Troubleshooting
181
SMART FRU Part Numbers
182
SMART FRU Warning Message Instructions
182
Problem Identification
182
Probable Cause Theory
182
Test the Theory
182
Plan of Action
182
Full System Functionality Verifcation/Preventative Measures
182
Documentation
183
Appendices
184
Appendix A: Layout Drawings
185
Appendix B: Contact Brooks Automation Technical Support
186
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Brooks MARATHON LEAP AX Specifications
General
Brand
Brooks
Model
MARATHON LEAP AX
Category
Laboratory Equipment
Language
English
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