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General| Brand | Brooks |
|---|---|
| Model | Marathon Express |
| Category | Laboratory Equipment |
| Language | English |
Provides a detailed overview of the Marathon Express system's features, components, and operation.
Details available optional modules and configurations for the Marathon Express system.
Introduces the major functional subsystems comprising the Marathon Express system.
Lists other manuals relevant for understanding and operating the Marathon Express.
Details the technical specifications of the Marathon Express system.
Emphasizes the critical importance of reviewing safety warnings for preventing injury.
Defines hazard alert formats, icons, signal words, and colors used in the manual.
Covers essential safety precautions for operating and servicing the equipment.
Visually identifies potential hazardous points on the Marathon Express.
Describes various safety labels and their locations on the system.
Explains safety interlocking capabilities for operator and system protection.
Details critical lockout/tagout procedures for safe maintenance and servicing.
Addresses hazards related to moving parts and crush points within the system.
Highlights risks associated with electrical connections and power handling.
Provides safety information regarding the low-power laser used for wafer mapping.
Details risks associated with vacuum systems, including implosion and explosion.
Covers hazards related to heavy lifting and system tip-over risks.
Discusses noise emission, vibration, and refrigerant gases in the system.
Identifies hazardous materials and the importance of MSDS sheets.
Specifies necessary site preparations including space and facilities.
Provides instructions for safely unpacking and inspecting the system upon arrival.
Details the step-by-step process for installing the Marathon Express system.
Instructions for removing shipping brackets to allow module movement and installation.
Guidance on positioning, leveling, and securing the main system unit.
Procedures for attaching and aligning process modules to the main system.
Details required facility connections like air, nitrogen, vacuum, and electrical.
Step-by-step guide to safely applying power and initializing the system.
Provides a high-level view of the MX system's components and architecture.
Details the different vacuum system packages and their components.
Describes the system for heating the transport chamber and its components.
Outlines the electrical power distribution and connections for the system.
Explains the function and components of the wafer buffer station.
Details the function and types of vacuum load locks used in the system.
Covers remote control capabilities for the heater power supply.
Details the AC power distribution unit and its connections.
Provides information on connecting the system to facility power.
Explains the fundamental principles of Marathon Express material transfer.
Describes the system's coordinate system for robot navigation and station identification.
Details the material transfer process involving VCE, robot, and aligner.
Describes system controls, indicators, and their functions.
Explains the function and location of various safety interlocks.
Covers operation modes (Bakeout, Continuous) and controls for the heating system.
Provides operational examples for vacuum systems including bakeout and start-up.
Describes the typical procedure for normal system operation after start-up.
General information on aligning system components to prevent errors.
Details the major steps in the system alignment process.
Ensures mechanical integrity between robot arm and system stations.
Steps required to prepare the system before starting alignment procedures.
Verifies and adjusts the flatness of robot end effectors for proper material handling.
Guides teaching robot locations for material transfer stations.
Procedure for teaching the robot the aligner station location.
Procedure for teaching the robot the locations of the process modules.
Methods for optimizing station assignments using the system aligner.
Verifies the successful completion of system alignment procedures.
Schedule and procedures for routine maintenance to ensure system longevity.
Instructions for cleaning material support pads to maintain performance.
Procedure for cleaning the cool chuck component of the TopCooler.
Steps for inspecting, cleaning, or replacing O-rings for seal integrity.
Checks end effector flatness for proper material support and handling.
Procedure for adjusting robot end effectors for planar motion.
Provides guidance on standard user servicing for repair and replacement.
Instructions for removing or replacing system viewports.
Procedure for replacing the main system lid.
Steps for replacing the lid lifter unit.
Procedures for replacing major robot components.
Instructions for replacing damaged chamber heating cartridge elements.
Guides users in identifying the general area of a system problem.
Addresses issues related to safety interlocks and their function.
Helps diagnose and resolve problems with material handling within the system.
Provides solutions for common issues related to the vacuum system.
Identifies standard FRUs available for system-level service.
Lists Field Replaceable Units specific to the robot system.
Identifies FRUs for the Vacuum Cassette Elevator modules.
Provides contact information and required details for technical support.
Information on accessing factory default settings for system components.
Logs system assignments and parameters for robot station configuration.
Guidance on proper packaging and shipping of the Marathon Express.
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