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Marathon Express
Brooks Marathon Express User Manual
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Marathon Express™
User Manual
Part Number 605914 Rev. B
2
Table of Contents
Table of Contents
6
Introduction
12
System Overview
12
Options
13
Subsystems
13
Supplementary and Related Documentation
15
Manual Notation
16
Specifications
17
Operating Specifications
17
Environmental Specifications
18
Mechanical Specifications
19
Electrical Specifications
20
Chamber Heating and Cooling
21
Facilities Specifications
21
Communications Specifications
24
Center of Gravity and Floor Loading
25
Site Requirements for Moving the Marathon Express
25
Process Module Space Allocation
25
Service and Exclusion Zones
25
Safety
27
Regulatory Compliance and Declaration of Incorporation
28
Explanation of Hazards and Alerts
29
Safety Text
29
Safety Icons
29
Signal Words and Color
29
Alert Example
30
General Safety Considerations
31
Illustration of Hazard Locations
33
Safety and Identification Labels
34
Illustration of Hazard Locations
36
Interlocks
40
Lockout/Tagout
41
Mechanical Hazards
42
Lid Lockout/Tagout Procedure
43
Electrical Hazards
45
Disconnect Devices
46
Laser Hazards
46
Thermal Hazards
47
Vacuum Hazards
48
Ergonomics Hazards
50
Tip Hazard
50
Environmental Information
51
Noise Emission
51
Vibration
51
Refrigerant Gasses
51
Recycling and Hazardous Materials
51
Material Safety Information
53
Installation
54
Site Requirements
54
Floor Space and Loading
54
Environmental
55
Facilities
55
Unpacking and Inspection
55
Procedure Category
58
Required Tools and Equipment
58
Unpacking Instructions
58
Installation Procedure
60
Procedure Category
61
Required Tools and Equipment
61
Remove Protective Packaging
62
Removing Shipping Brackets
62
Installing the Vacuum Cassette Elevators
63
Installing the Marathon Express
63
Mounting the Process Modules to the MX System
66
Intermodule Connections
67
Facilities Connections
69
Electrical
74
EMO Circuit
75
Communications Connections
78
Power-Up Sequence
79
Subsystems
83
System Overview
83
Transport Chamber
84
Transport Chamber Lid Assembly
84
Lid Operation
84
Frame Assembly
85
Power Distribution
86
AC Power Distribution
86
Circuit Protection
87
Vacuum Systems
87
Pumping System
87
Chamber Isolation Valves
89
Venting System
89
Vacuum Measurement System
90
Gauges
90
Vacuum System Control
90
Pneumatic System
90
Gas System
91
Water System
92
Transport Chamber Heating System
92
Heater Power Supply
93
Heaters
94
Temperature Controller
95
Thermal Blankets
96
Transport Chamber Cooling System
96
Electrical System
97
Devicenet
98
Topcooler
98
Topligner Vacuum Aligner
98
Integral Wafer Buffer Station
98
Material Presence Sensors
99
Magnatran 7 or LEAP Vacuum Robot
99
Control/Display Module
99
Vacuum Load Locks
100
Svl
100
Vce
101
5. Operational Interfaces
102
Heater Power Supply Remote
102
AC Power Distribution
104
Power Connections
105
AC Power Distribution Cable
106
Operation
107
Theory of Operation
107
Station Coordinate System
108
Marathon Express Frames of Reference
110
Robot's Frame of Reference
111
Aligner's Frame of Reference
111
System Operation Overview
111
Determining Material Locations
114
Pick and Place Commands
114
Material Presence Sensing
115
Wafer Mapping
115
Radial Motion Sensors
115
Controls and Indicators
115
AC Power Distribution
115
Heater Power Supply
116
Temperature Controller
118
Ethernet to Serial Gateway Module
119
Ethernet Switch Module
120
Safety Interlocks
121
Lid Open
122
Emergency off (EMO) Circuit
122
Lid Lifter Operation
123
Raising the Lid
123
Lowering the Lid
124
Control/Display Module (CDM) Operation
125
DC Power Supply
125
Heating System
125
Power Supply
126
Operation
127
Standard Operation
128
Temperature Controller
128
Watlow Temperature Controller Overview
129
Heating Modes
129
Heating Control
130
Water Cooling Systems
132
Chamber Cooling System
133
Pump Cooling System
133
Wafer Cooling System
133
Pneumatic (Air Distribution) System
134
Gas Facilities Operation
134
Controls and Indicators
135
Topcooler Operation
135
Topligner Vacuum Aligner Operation
135
Vacuum System Operation
136
Initial Conditions
136
Chamber Bakeout
136
Start-Up
136
Exchange Wafers in the Load Locks
136
Shut down from High Vacuum
137
Vent Transport Chamber
137
Vent Load Locks
137
Venting the Chambers - Profiled Vent
137
Start-Up
138
Normal Running
139
7. Command Reference
140
8. System Alignment
141
Overview
141
Procedure Category
142
Required Tools and Test Equipment
142
Alignment Strategy
142
Alignment Overview
143
Alignment Process
144
Level the VCE Platforms
146
Level the Process Modules and Dock to the Marathon Express
146
Adjust the Robot's End Effectors
146
System Preparation
148
Initializing the Vacuum Cassette Elevators
149
Initializing the Topligner
150
Initializing the Topcooler
150
Initiating the CDM
150
Opening the Chamber Lid
150
Alignment Procedures
151
Setting the Options for the Vacuum Robot
151
Teach the Robot to the Topligner Vacuum Aligner
151
Procedure Category
151
Required Tools and Test Equipment
152
Configuration and Alignment Strategy
152
Teach the Robot the Aligner Station
152
Teach the Robot with the Topcooler
154
Teach the Robot the Cooler Station
155
Vacuum Cassette Elevator Configuration and Alignment
156
Configuration and Alignment Strategy
157
Set the Robot to the VCE WTP
158
Adjust the Load Lock Platform
161
Set the Load Lock T and R Coordinates
163
Align the Load Lock's SPS
165
Teach the Robot the Integral Wafer Buffer Station
165
Procedure
166
Teach the Robot the Process Modules
167
Procedure
168
Teaching Pan 'B' on a Dual End-Effector Arm Set
169
Fine-Tuning the Station Assignment
170
Using the Aligner as a True Position Reference
170
Using Physical Location as a True Position Reference
171
System Alignment Check-Out
171
Alignment Procedure
172
9. Maintenance and Repair
174
Preventative Maintenance
174
Parts
175
Pad Cleaning Procedure
175
Maintenance Procedure
176
Cleaning Procedure
177
Maintenance Procedure
178
Topcooler Cool Chuck Cleaning
179
Maintenance Procedure
180
O-Ring Removal/Replacement/Cleaning
181
Maintenance Procedure
182
Verifying Flatness of Robot's End Effector
183
Measurement Procedure
184
Adjusting the Robot's End Effector(S)
185
Adjustment Procedure
186
Repair Philosophy
187
Repair Procedures
187
Wafer Change-Over Procedure
187
Maintenance Procedure
189
Removing/Replacing Viewports
189
Lid Replacement
192
Lid Lifter Replacement
194
Vacuum Robot, Arm, or End Effector Replacement
196
Pad Removal/Replacement
199
Heater Cartridge Replacement
200
Topcooler Poppet Open/Close Sensor Adjustment
202
Topligner Support Pin Replacement
202
Isolation Valve Replacement
202
10. Troubleshooting
203
Initial Troubleshooting
203
Interlocks
204
Material Transport
204
Topligner Vacuum Aligner
204
Pressure/Indicator Switch
205
Vacuum System
205
Field Replaceable Units Marathon Express
208
12. Appendices
218
Appendix A: Contact Brooks Automation Technical Support
219
Appendix B: Factory Default Settings
220
Default Robot Settings
220
Default VCE 6 Drive Settings
220
Default Topligner Vacuum Aligner Settings
220
Appendix C: Station Identification
221
Appendix D: Document Abbreviations
222
Appendix E: Consumables
223
Appendix F: Packing and Shipping Instructions
224
Packing Procedure
226
Appendix G: Material Safety Information
229
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Brooks Marathon Express Specifications
General
Brand
Brooks
Model
Marathon Express
Category
Laboratory Equipment
Language
English
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