Brooks Marathon Express - Normal Running

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Normal Running
Step Action
5.
PoweruptheMarathonExpressaspreviouslydescribed.
6.
Powerupthehostcontrollerasdirected.
7.
OnceallsystemsareupandrunningproperlythehostcontrollerwilltypicallyinstructtheMarathon
ExpresstobeginpumpingdowntheTransportModulechamber.
8.
OncetheTransportModulechamberhasbeenpumpeddown,proceedasdirectedbythehostcon-
troller.
Normal Running
NormaloperationofanMXsystemiscontrolledbytheuser'shostcontroller.Normaloperation
wouldtypicallyproceedasfollows:
Step Action
1.
PoweruptheMarathonExpressClusterToolaspreviouslydescribedin"Power-upSequence"on
page79.
2.
Powerupthehostcontrollerasdirectedbyitsusermanual.

OnceallsystemsareupandrunningproperlythehostcontrollerwilltypicallyinstructtheMarathon
ExpresstobeginpumpingdowntheTransportModulechamber.

TheexactusageoftheMarathonExpressClusterToolIntegrationPlatformmustbedeterminedbythe
user.Eachcomponenthasbeendescribedinthismanualwiththeintentionofprovidingtheuserwith
theknowledgetousethistoolinthemostappropriatemannerfortheirindividualprocesses.
3.
OncetheTransportModulechamberhasbeenpumpeddown,proceedasdirectedbytheClusterTool
Controller.
Copyright © 2023, Brooks Automation, Inc.
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