Brooks Marathon Express - Introduction to Marathon Express; System Overview

1. Introduction Marathon Express
System Overview Part Number: 605914 Rev. B
1. Introduction
ThisIntroductionprovidesabriefoverviewoftheBrooksAutomationMarathonExpress™Cluster
ToolIntegrationPlatformhighlightingitsfeatures,components,operation,andspecifications.
Additionally,thechapterorganizationandadescriptionofeachchapter’scontentsispresented,
andnotationconventionsareexplained.
ThisMarathonExpressisintendedforusebyindustrialcustomersandshouldbeservicedonlyby
BrooksorBrookstrainedrepresentatives.Theservicemanualsandrelatedmaterialsareprovided
inEnglishatnochargeandareintendedforusebyexperiencedtechnicians.Itistheresponsibility
oftheusertoobtainandassuretheaccuracyofanyneededtranslationsofmanuals.Ifyourequire
assistancepleasecontactBrooksservicedepartment.Contactinformationcanbefoundat
www.brooks.com.
System Overview
TheBrooksAutomationMarathonExpress(MX)ClusterToolIntegrationPlatformtransfers100mm
to200mmwafersor100mmto150mmsquaresubstratesfromaVacuumCassetteElevatorLoad
LockintoaVacuumBackEndforaccesstomultipleProcessModulesformulti-stepprocessing
withoutleavingthevacuumenvironment.TheMXsystemprovidesSEMI-standardcompatible
processmoduleandmaterialcarrierinterfacesystems,withafullsetofoptions,tomeetfactory
interfacerequirements.
TheBrooksAutomationMXsystemisdesignedforuseinavacuumtransportclustertoolsystem.
ThefullMarathonExpresssystemincludestheclustertoolplatformthataccommodatesupto6
ProcessModules,twovacuumcassetteelevators,andavacuumrobot.Figure1-1showsa
MarathonExpressClusterToolwithallBrooksAutomationcomponents.
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