Brooks Marathon Express - Vacuum Cassette Elevator Configuration and Alignment

8. System Alignment Marathon Express
Vacuum Cassette Elevator Configuration
and Alignment
Part Number: 605914 Rev. B
AlwaysverifyproperoperationoftheCDME-Stopbuttonbeforeperforminganyteachproceduresbypressingthe
E-Stopbuttonandverifyingthatthearmisnolongerpoweredandthatwhilethebuttonisdownnomotioncom-
mandsareaccepted.
WithintheMarathonExpressthedefaultstationassignmentfortheTopCoolerisStation8.Referto
"StationCoordinateSystem"onpage108foradetaileddescriptionofthestationassignments.
Step Action
1.
Usingtherobot’sCDM,teachtherobottheR,T,andBTOvaluesfortheTopCooler.

SETUP -> STATIONS -> 8 -> CR -> LEARN R, T, BTO -> HAND LOCATE
a. Manuallymovetherobot’sendeffectorwithatestwaferproperlycenteredonit(bythealigner)
intothecoolerpoppet,adjustingZasnecessarysothewaferclearsthecooler’swafersupports
(1.5mm(0.06in)minimum).
b. OncetheendeffectorispositionedcorrectlysavetheR,T,andBTOvaluesfortherobotusing
the
CDM. ESCAPE -> STORE -> R -> T -> BTO -> QUIT
2.
Teachtherobottheamountitmusttraveldowntodepositthewaferandprovidetheendeffectorclear-
ancewhilemovingunderthewafer.
SETUP -> STATIONS -> 8 -> CR -> LEARN LOWER -> JOG
Jogthewaferdownintopositionandcontinuejoggingdownsotheendeffectoris1.85mm(0.073in)
belowthewaferwhenthewaferisrestingonthecooler’swafersupports.
3.
OncethewaferandendeffectorarepositionedcorrectlysavetheLowervalueusingtheCDM.
ESCAPE -> STORE -> L -> QUIT
4.
Usingtherobot’sCDM,movetherobot’sarmoutoftheTopCoolerstation.
SETUP -> STATIONS -> 8 -> CR -> LEARN R, T, BTO -> HAND LOCATE
a. Movetherobot’sarmwiththewaferoutofthecoolerstationandexituseofthevacuumrobot
usingtheCDM.QUIT
5.
RecordtheStationcoordinatesintheappropriateworksheetprovidedinAppendixF:"Packingand
ShippingInstructions"onpage224.
Vacuum Cassette Elevator Configuration and Alignment
ThefollowingprocedurewillteachtherobottheVacuumCassetteElevatorstationvalues.
NOTE: Thestationsreferencedhereareforastandardconfiguration.Actualstation
assignmentsmayvarybasedonthesystemconfiguration.
Changingstationassignmentsmaycauseinterlockstobeignored.Changingthe
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