Brooks Marathon Express - Removing;Replacing Viewports

Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B Repair Procedures
Maintenance Procedure
NOTE: Afteranychangesaremadetothesystem(includingthesizeofthewafer),the
systemshouldbecompletelyrealigned,asdescribedin"SystemAlignment".
MagnaTran 7 Robot:
l
Changetherobot’sendeffectors(seetherobotusermanual)
l
Reteachtherobotallstations
VCE 6 Load Lock
l
AdjusttheVCE’swaferslideoutdetector(seetheVCEUserManual)
TopLigner Vacuum Aligner:
l
Changethealigner’schuck
l
Changethealigner’sCCDposition
l
Changethesystemsoftwaresettings(seetheappropriateusermanual)
TopCooler:
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Adjustthecooler’swaferclips
System Software:
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Changesystemsoftwaresettings(seeappropriateusermanual)
Removing/Replacing Viewports
Manymaintenanceandrepairproceduresrequireremovingaviewportforaccesstothe
component.Additionally,viewportsmayneedtobereplacediftheybecomescratchedorbroken.
ProcedureCategory
Type1Procedure:Equipmentisfullyde-energized.
RequiredTools
l
MetricHexWrenches
ReplacementStrategy
Turnoffanddisconnectallpower,communications,andairconnectionsasdetailedin"Shut-down"
onpage1.
Copyright © 2023, Brooks Automation, Inc.
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