Brooks Marathon Express - Pneumatic (Air Distribution) System; Gas Facilities Operation

6. Operation Marathon Express
Pneumatic (Air Distribution) System Part Number: 605914 Rev. B
RefertotheSystemBlockDiagram,VacuumandVentDiagrams,andWaterDiagramsuppliedwith
thismanual.
Pneumatic (Air Distribution) System
TheMXsystemrequirescompressedairforoperationofpneumaticvalvesandaircylinders.
Thepneumaticvalveswithinthebankarecontrolledelectronicallyfromthesystemcontroller.The
airpressureismonitoredbytheDigitalPressureSwitchlocatedontheMainPneumaticSupply
panel.
Figure 6-13: Air Distribution Panel
Gas Facilities Operation
TheGasFacilitiesPanelislocatedundertheI/ODistributionHubunderneaththechamber.Access
tothepanelisprovidedbehindtheVCEs.TheGasFacilitiesPanelprovidesasinglepointinterface
forfacilitysuppliedgases(nitrogen,argon).
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