Brooks Marathon Express - Mechanical Specifications

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Specifications
Mechanical Specifications
AlldrawingswithinthismanualaregenericandmaynotreflectspecificbuildsoftheMarathonExpress.Toobtain
acompleteandcurrentsetofdrawingsanddocumentscontactBrooks’CustomerSupport.SeeContactUs.
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Specification Value
Dimensions
RefertoFigure1-2onpage24andTable1-7fortypicalphysicaldimensions,fortheactual
dimensionsofthespecificsystem,includingfootandseismictie-downlocationsrefertothe
MechanicalLayoutDrawingsuppliedwiththismanual.
Weight
RefertoTable1-7fortypicalsystemweights,fortheactualweightofthespecificsystem,
includingFloorLoadingandCenterofGravityrefertotheMechanicalLayoutDrawingsup-
pliedwiththismanual.
ExposedMaterials
(Atmosphere)
AnodizedAluminum,6061T6Aluminum,5080RAluminum,316StainlessSteel,AM350
StainlessSteel,ColdRolledSteel,BakedPowderCoatedEpoxy,7740Pyrex®,7056
Glass,Viton®,Lexan®
ExposedMaterials
(Vacuum)
6061T6Aluminum,5080RAluminum,316StainlessSteel,AM350StainlessSteel,Sintered
Nickel,ElectrolessNickelPlate,7740Pyrex,7056Glass,BK7Glass,Teflon®,Viton,
Kalrez®,TinnedCopperWire,Quartz(TopCooleroption)
CassetteType
100mm,125mm,150mm,and200mm
SEMIstandardcassettes
25or26wafercassetteconfigurations
VacuumPorts
AtVCEinterfacepanel
Asspecifiedbyuser
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AtMarathonExpressVacuumTransportSystem
ISO160PortforHighVacuumPump
ISO200PortforHighVacuumPump
KF50PortforVenting
KF40PortforRoughPump
KF25PortforMaterialSensor(xfacetnumber)
KF25PortforVacuumGauging(x2)
KF16PortforVacuumGauging(x2)
NitrogenPort
1/4inchVCRfittingatNitrogenFacilitiesConnection
Tosupportventingcapacity,aminimumofa3/8inchO.D.lineisrequiredwithareducerto
connecttothe1/4inchVCRfitting.
ArgonPort 1/4inchVCRfittingatTopCoolerFacilitiesConnection
PneumaticPort 10mmQuickConnect
Water 1/2inchODtubing,Swagelokinterface
Table 1-3: Mechanical Specifications
Copyright © 2023, Brooks Automation, Inc.
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