Brooks Marathon Express - Lid Lifter Operation; Raising the Lid

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Lid Lifter Operation
Lid Lifter Operation
Thelidmayberaisedtocleantheinsideofthechamberandtherobotortoremovetherobot,the
robotarms,ortherobotendeffector(s).Thelidisprovidedwithamanuallyoperated,gear-driven
liftertoalloweasyopeningandclosing.TheLidLifterisaccessedthroughtheserviceareasshown
in"ServiceandExclusionZones"onpage25.TheLidLifterprovidesa90°openingangleinthe
verticalplane.
NOTE: Donotattempttooperatethelidlifterifthechamberisundervacuum,the
captivehardwareistight,ortheO-ringsealhasnotbeenreleased.Damagetothe
lifterwilloccur.
Raising the Lid
Thelidissecuredtothechamberbycaptivescrews.Typicallocationsandquantitiesareshownin
Figure6-8.Theactuallocationsandquantitiesmayvary.
Figure 6-8: Lid and Lifter Operation

Copyright © 2023, Brooks Automation, Inc.
123