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Brooks Marathon Express - Heater Power Supply

Brooks Marathon Express
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6. Operation Marathon Express
Controls and Indicators Part Number: 605914 Rev. B
Figure 6-3: AC Power Distribution Unit - Controls and Indicators
Name Type Function
CB1 CircuitBreaker,20A
MainCircuitBreaker
ON:Poweron
OFF:Poweroff
CB1 CircuitBreaker,10A
OutputCircuitBreaker1
ON:PoweronOFF:Poweroff
CB2 CircuitBreaker,10A
OutputCircuitBreaker2
ON:Poweron
OFF:Poweroff
Table 6-1: AC Power Distribution Unit - Controls and Indicators
Heater Power Supply
TheMarathonExpressusesaHeaterPowerSupplytopowerthechamberheaters.Table6-2
showsthelocationofthecontrolsandindicatorsontheHeaterPowerSupply.Table6-2showsthe
functionassociatedwitheachofthem.
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