Brooks Marathon Express - Shut down from High Vacuum; Vent Transport Chamber; Vent Load Locks; Venting the Chambers - Profiled Vent

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Vacuum System Operation
d. Initiateprofiledvent.
e. Initiatefastventwhenpressure>80Torr.
f. WhenDigitalPressureSwitchindicatespressureisequaltooutsidepressure,securevent.
b. Exchangewafers.
a. OpenLoadLockdoor.
b. Exchangecassette.
c. CloseLoadLockdoor.
c. PumpdownLoadLock.
a. Openslowrough.
b. Openfastroughatcrossover(80Torr).
c. Shutslowandfastroughvalves.
d. Opencryopumpisolationvalveandenergizehighvacuumgauge.
WhenLoadLockchamberpressureis<1x10-5Torr,LoadLockisreadyforprocessing.
Shut down from high vacuum
a. Turnoffhighvacuumgage.
b. Turnoffturbopump.
c. Whenturbopumphasstopped,shutturbopumpforelinevalve.
d. Shutcryopumpisolationvalve.
e. Shutdowncryopanel(cryopumpregenerationmustoccurwhenchamberisundervacuum,ifcryo
pumpisnotgoingtoberegenerated,useroughvacuum).
Vent Transport Chamber
a. Openfastventvalve
b. Closeventwhenchamberpressureswitchindicatespressureisequaltooutsidepressure
Vent Load Locks
a. Shutturbopumpforelinevalve.
b. Secureturbopump.
c. De-energizehighvacuumgauge.
d. Initiateprofiledvent.
e. Whenpressure>80Torr,openfastventvalve.
f. Closeventwhenchamberpressureswitchindicatespressureisequaltooutsidepressure.
Venting the Chambers - Profiled Vent
ThefollowingexampleofaventsequenceappliestoLoadLockandTransportChambershaving
fastventandprofileventvalves.Theprofileventvalveusestimetodeterminecrossoverpointto
fastvent.Bothvalvesareopenatcrossover.Anatmosphericswitchdetermineswhenatmosphere
hasbeenreached.
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