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Brooks Marathon Express - Thermal Blankets; Transport Chamber Cooling System

Brooks Marathon Express
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4. Subsystems Marathon Express
Transport Chamber Cooling System Part Number: 605914 Rev. B
Figure 4-8: Temperature Controller - Gen 5
See"HeatingSystem"onpage125,"TemperatureController"onpage128,andtheHeater
SubsystemdrawingsandSystemBlockDiagramsuppliedwiththismanual.
Thermal Blankets
Toensurerapidheatingwithminimalheatloss,andtoprovidesomethermalprotectiontoservice
personnel,ThermalBlanketsarecreatedthatprovideacustomfitaroundthetopandsidesofthe
MXsystem’schamber,lid,andlidlifter.Theseblanketsmustbeinplacebeforeabake-outprocess
isbegun.TheblanketsmaybeleftinplaceduringnormaloperationoftheMXsystemastheyare
designedsuchthattheywillnotinterferewithnormaloperation.
Transport Chamber Cooling System
ForMXsystemsthathavetheoptionalChamberHeatingSysteminstalledanoptionalChamber
CoolingSystemmaybeinstalledontheMXTransportChambertoassistinrecoveryfrombakeout.
Thedesignofthewaterchannelswithinthechamberallowswaterflowineitherdirectionallowing
theusertodeterminethepreferredconnectionpointsforwaterflowinginandwaterdrain.Cooling
wateriscirculatedthroughchannelsdrilledintotheTransportChambertoprovidearapidcool-
downafterbakeout.SeeFigure4-9fortheroutingofthewaterpathforsystemsusingtheElectric
Heatingoption.
96
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