Brooks Marathon Express - Initializing the Vacuum Cassette Elevators

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B System Preparation
NOTE: ThisprocedureassumesthatallLoadLocksandProcessModulesare
connectedtotheTransportChamberpriortoadjustmentandthatpreliminaryleveling
ofeachcomponentandtheTransportChamberhavebeencompleted.

Donotproceedtothenextstepuntilallchamberswithinthesystemareatatmosphericpressure.Damagetothe
systemcouldresult.

Step Action
1.
Openeachslotvalve.
2.
Shutoffthevacuumandventingsubsystemsandperformlockout/tagoutproceduresonthosesub-
systemstoensurethattheSlotValvesandotherassociatedvalvesdonotmoveunexpectedly.Ifno
suchproceduresexist,followtheguidelinesprovidedin"LaserHazards"onpage46.

Safety
l
Read,understand,andfollowthesafetyadvisein"Safety".
l
Duringtheteachingprocedure,thesystemisataType2ElectricalHazardCategory.
l
Breakingmaterialcancauseflyingshards.Alwaysweareyeprotectionwhenteachingtherobot.
LeveltheChamberandSettheWTPHeight
TheheightoftheMarathonExpressmustbeproperlysetandtheentiretoolmustbelevelbefore
anyothersystemalignmentsareperformed.ThesystemWaferTransportPlane(WTP)mustbeset
totheSEMIMESCstandardheight(seeFigure3-3onpage65)andtheentiresystemmustbe
level,referto"LevelingtheMarathonExpressandSettingtheMaterialTransportPlane"onpage
63.Thisprocedureshouldonlyneedtobeperformedduringinitialsysteminstallationorwhenever
thesystemismoved.
Initializing the Vacuum Cassette Elevators
VerifythatallsetupproceduresintheVCEUserManualhavebeencompleted.Somestepsmay
havebeenperformedatthefactory.
Thealignmentprocedurerequiresmovingtheelevatorplatformtovariouspositions,includingthe
positionsitmusttraveltowhenmovingawafercassette.Torespondcorrectlytomotioncommands,
theVacuumCassetteElevatorcontrollerneedstoknowcertaininformationaboutthetypeof
cassettesthefacilitywillbeusingtoprocesswafers.RefertotheVCEUserManual.
Copyright © 2023, Brooks Automation, Inc.
149