Brooks Marathon Express - System Alignment Procedures; Overview

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Overview
8. System Alignment
ThischapterprovidesthealignmentinstructionsfortheBrooksAutomationMarathonExpressand
itsintegratedcomponents.
Overview
ThecomponentswithintheBrooksAutomationMarathonExpressmustbealignedtoeachotherto
preventmisplacementofmaterialorcollisionoftherobotwithotherpartsofthesystem.Notethat
evenasmallmisalignmentcaninterferewithpropersystemoperation.Thecomponentsofthe
systemwerealignedforusewithaspecificmaterialsizeandtypeatthefactorypriortoshipment.
However,iftheuserreconfiguresthesystemfordifferentmaterialthesystemmayneedtobe
retaught.
TheusermustperformthefollowingalignmentprocedureaspartofinstallingtheMarathonExpress
inasystem.Thisproceduremustbeperformedduringroutinemaintenanceandwhenevertherobot
endeffectororoneofthesystemmodulesrequiresreplacement.BrooksAutomationrecommends
analignmentcheckunderthefollowingcircumstances:
l
AcompletealignmentwhentheMarathonExpressisfirstsetupattheuser’ssite.
l
Acompletealignmentwhenanyofthecontrollersarereplaced.
l
Acompletecheckwhenanyoftherobot’sendeffectors,arms,ordriveisreplaced.
l
Apartialalignmentattheappropriatestation(s)wheneveranycomponentisreplaced.
l
Acompletecheckofallstationswheneveranalignerisreplaced.
l
Acompletecheckofallstationseverythreemonthsasperiodicpreventivemaintenance.
l
Acompletecheckatallstationsiftherobotendeffectorortherobotarmshitanypartofthechamberor
anyoftheattachedmodules.
l
AcompletecheckiftheMarathonExpresswasinvolvedinamaterialtransfererror.
l
AcompletecheckiftheMarathonExpresswasinvolvedwhenanEmergencyOff(EMO)occurred.
BeforeattemptingtoaligntheMarathonExpress,befamiliarwiththesubsystemsattachedtothe
ClusterTool.
l
Bepreparedtousetherobot’shand-heldControl/DisplayModule(seetherobotmanual)
l
UnderstandtheoperationoftheVacuumCassetteElevators(seetheVCEUserManual)
l
UnderstandtheoperationoftheVacuumAlignerandWaferCooler.
l
Readthroughtheentirealignmentprocedurebeforebeginning.
l
RecordtheStationcoordinatesforeachrobotintheappropriateworksheetprovidedinAppendixC:
"StationIdentification"onpage221.
Copyright © 2023, Brooks Automation, Inc.
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