Brooks Marathon Express - Vacuum Systems

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Vacuum Systems
Circuit Protection
Themainpowerlineisprotectedthrougha20Ampmultipolarmagneticcircuitbreaker.Thebreaker
isacurrent-limitingdevicewhichdisconnectstheMarathonExpressfromtheutilityinthecaseofa
fault(shortcircuit).
Vacuum Systems
ThemodulardesignoftheMarathonExpressallowsforconfigurationchangestosupportdifferent
vacuumsystempackages.Totheextentpossible,theindividualvacuumsystempackagesfeature
thesamecomponentstoreducethenumberofrequiredsparepartsandtosimplifymaintenance
andrepair.
TheMarathonExpresssystemsaresuppliedwithvacuumsystempackagestoprovide
environmentalcontrolfortheTransportChamber,theLoadLocks,andanyotherperipheralitems,
asrequested.Vacuumsystempackagesaredesignedtominimizetheintroductionofcontaminants
intothechambersduringevacuationandventcyclesbyusingprofiledpumpdownsandprofiled
ventupswhererequired.ThecompleteMXsystemprovidesintegratedmanagementofallvacuum
systempackagessuppliedwiththesystem.
Eachvacuumsystempackagehasfiveelements:apumpingsystem,avacuummeasurement
system,chamberisolationvalves,aventingsystem,andavacuumcontrolsystem.Eachofthese
systemsisdescribedbelow.
RefertotheSystemBlockDiagramandVacuumandVentDiagramssuppliedwiththismanual.
Pumping System
Thepumpingsystemisdesignedtobringmodulesfromatmosphericpressuretohighvacuumwith
minimumintroductionofcontaminantsandturbulence.Eachmoduletobeevacuatedgenerally
incorporatesamainpump,abackingpump,apumpventvalve,andapumpcontroller.Roughing
vacuumisrequiredandcanbeprovidedbyaBrooksAutomationsuppliedbackingpumporfroma
user-providedsource.
MainPump
Mainpumps,whicharenormallyturbomolecular(turbo)pumpsorcryogenic(cryo)pumps,are
usedtoevacuatetheTransportChamberandLoadLockchambers.Mainpumpsareselectedon
thebasisofthefollowingfeatures:
l
Highreliabilitywithminimumvibrationandcontamination
l
Capabilitytopumpfromatmospheretopressuresbelow10-8Torr
Copyright © 2023, Brooks Automation, Inc.
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