Brooks Marathon Express - Chamber Heating and Cooling; Facilities Specifications

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B Specifications
Chamber Heating and Cooling
Specification Value
BakeoutTemperature 120°C±10°Cmax,programmableusingcontroller
TemperatureControl Singlezone,toolmountedPIDcontroller,RS-485interface
Over-tempProtection Thermalswitch
Heater 750W,4places
Heat-upTime
20°Cto120°Cin3hours(forbasesystemassuppliedbyBrooksAutomationonly,does
notincludeanyuserattachedmodules)
Cool-downTime
120°Cto40°Cin2hours(withwatercoolingoption)(forbasesystemassuppliedby
BrooksAutomationonly,doesnotincludeanyuserattachedmodules)
Table 1-5: Chamber Heating and Cooling

Facilities Specifications
Specification Value
Pneumatic
Typicalconfigurationsrequirethefollowingsupplyofclean,dry(unfiltered),oilfreeair:
90psig±10psigat50slmnominal,200slmmaximum
Nitrogen
Typicalconfigurationsrequirethefollowingsupplyofclean,drynitrogen:
<1ppmcontamination
40psig±5psigat100slmnominal,300slmmaximum
Argon
ConfigurationsusingafacetmountedTopCoolermayrequirethefollowingsupplyof
clean,dryargon:
<1ppmcontamination
20psig-5/+0psigat10sccm
Vacuum,Backing
Typicalconfigurationsrequirethefollowingdifferentialvacuumsupply(inputtovacuum
alignerseals)
635mmHgat50cc/sec(25inHgat3.05ci/sec)
Vacuum,Rough
Pumpingspeed,900lpm(32cfm)minimum
Ultimatepressure,<23mTorr
Vacuum,Foreline
Pumpingspeed,900lpm(32cfm)minimum
Ultimatepressure,<23mTorr
Table 1-6: Facilities Specifications
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