Brooks Marathon Express - Vacuum Load Locks

4. Subsystems Marathon Express
Vacuum Load Locks Part Number: 605914 Rev. B
Potential Robot Movement
Theproducthasthepotentialforautomaticmotionthatmaycausedeathorserious
injury.
l
Avoidworkinginsidethemovementpathorunderextendedcomponents.
l
Usephysicalbarrierstopreventinjurywhenworkinginthemovementpath.
Vacuum Load Locks
TheMarathonExpresssystemsupportstwovacuumloadlocks.Theseloadlocksmaybeeithera
SmallVolumeLock(SVL)holdingtwowafersoraVacuumCassetteElevator(VCE)which,when
installedwithaslot-valve,functionsasaloadlockallowingcassettestobechangedwithout
disturbingtheenvironmentwithinthechamber.OntheMXsystem,allplumbingfortheloadlock
vacuumsystemisintegratedintotheplumbingonthechamberframe.
SVL
TheBrooksAutomationSmallVolumeLock(SVL)isaSEMI-compatibleinterfacedesignedfor
automatedloadingofmaterialwaitinghorizontaltransfer.TheSVLprovidesaninterfacebetween
theatmosphericenvironmentofthemanufacturingfacility,typicallyanEFEM,andthevacuum
environmentoftheclustertool.
TheSVLprovidestwotransfershelvesallowingcyclingofprocessedandunprocessedmaterial
throughthelockatthesametimewithoutdisturbingthevacuumenvironmentoftheclustertool.
Loadlocksareprovidedwiththeirownvacuumsystemsincludingpumpsandmonitoring.The
chamberlidcanberemovedforaccesstothematerialshelvesforservicing.
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