Brooks Marathon Express - Teach the Robot the Cooler Station

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Teach the Robot with the TopCooler
ProcedureCategory
Type2Procedure:Equipmentisenergizedandallenergizedcircuitsarecoveredorinsulated.All
workisperformedremotelyusingtheCDMorservicecomputer.
RequiredToolsandTestEquipment
l
Robotmanual
l
MicroToolDummyWaferortestwaferoftheappropriatesize
l
CDM(Control/DisplayModule)
AlignmentStrategy
ConfiguringthesystemrequiresconfiguringtherobottoworkwiththeTopCooler,andteachingthe
robotthecooler’slocation.RefertotherobotmanualfordetailedinformationonusingtheCDMand
teachingstations.Fortheprocedureprovidedbelow,thefollowingconfigurationisassumed:
l
TopCoolerisStation8fortherobot
Teach the Robot the Cooler Station
Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,thepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
l
Robot
l
Aligner
l
CoolModulePoppet
l
LoadLockModule(s)(AutoDoor,Arm,Platform)
l
AtmosphericDoors
l
VacuumSlotValves
l
IsolationValves
l
Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.

DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.

Donotoperatetherobotwithouttheprotectivecoversinplace.

DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.

Copyright © 2023, Brooks Automation, Inc.
155