Brooks Marathon Express - Transport Chamber; Transport Chamber Lid Assembly; Lid Operation

4. Subsystems Marathon Express
Transport Chamber Part Number: 605914 Rev. B
alignedtotheWTP.Thisconfigurationpermitsattachmentofmaterial-handlingorprocessing
modulestoeachfacetofthechamber.
Transport Chamber
Transport Chamber Lid Assembly
TheMarathonExpresslidislocatedonthetopofthetransportchamber,sealingthechamberand
providingaccessintothechamberforservice.Thelidassemblyconsistsofthelidandlidlifter.The
lidmeetsallSEMIS2andEUsafetystandards.
Figure 4-1: Marathon Express Lid and Lid Lifter
Lid Operation
Thelidisprovidedwithamanuallyoperated,gear-drivenliftertoalloweasyopeningandclosing.
TheLifterprovidesa90°openingangleintheverticalplane.See"LidLifterOperation"onpage123
forusageinformation.
84
Copyright © 2023, Brooks Automation, Inc.