Brooks Marathon Express - Controls and Indicators

Brooks Automation 6. Operation
Part Number: 605914 Rev. B Controls and Indicators
Material Presence Sensing
ThealignercanusetheCCDtodeterminewaferpresencebylookingfortheshadowofawaferon
thechuck.TousethealignerWPS,enterRQWPRS.
Wafer Mapping
TheVCEshaveanOpticalWaferMapperusedtomapcassettesandreportthepresenceofwafers
inparticularslots.Tomapacassette,ensuretheVCEdoorisclosedandthechamberispumped
downtotheoperatingvacuum,thenenterA,MPtomapthecassetteandR,MItorequestthemap
information.
Radial Motion Sensors
TherearematerialsensorsintheMarathonExpressVacuumBackEnd’schamber,positioned
accordingtotherespectiverobotusermanualasanR_MT(RadialMotion)materialsensor.The
vacuumrobotcanbecommandedtodoaCHECKLOADtodeterminematerialpresence.This
commandcausestherobottomovethematerialsuchthattheedgeofthematerialpresentonthe
endeffectorwouldtriggerthesensor.
TherobotautomaticallycheckstheR_MTsensorbeforeandafteraPickoraPlace.Ifthematerial
presentstatedoesnotmatchtheexpectedstatetherobotwillgenerateanerror.
Controls and Indicators
ThissectionprovidesadescriptionoftheMarathonExpresscontrolsandindicators.Controlsforall
MXsystemoptionsarelisted,howeverifanoptionisnotinstalled,thosecontrolsandindicatorsare
notpresent.MarathonExpresscontrolsincludemanuallyoperatedswitches,interlocks,andpush
buttons.MarathonExpressindicatorsincludealllamps,LEDs,andgauges.
Seerelatedcomponentmanualsandcontrolsmanualformoreinformation.
AC Power Distribution
ACpowerwithintheMarathonExpressisdistributedthroughoutthetoolfromtheACPower
DistributionUnit(ACPDU),whichalsoprovidescircuitprotection.Figure6-3showsthelocationof
thecontrolsandindicatorsontheACPDU.Figure6-3showsthefunctionsassociatedwitheachof
them.
NOTE: TheACPDUisnotintendedtosupplypowertouserinstalledmodules.
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Copyright © 2023, Brooks Automation, Inc.
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