Brooks Marathon Express - Alignment Procedure

8. System Alignment Marathon Express
System Alignment Check-out Part Number: 605914 Rev. B
IfthereisanymaterialmotionorcontactwithanysurfaceswithintheMXsystemwhilethematerial
isbeingtransferredthestationwherethemotionorcontactoccurredmustberetaught.
NOTE: Thisproceduremustbeperformedduringinitialsetupandatanytimethatthe
robot’sarmsorendeffector(s)aredamaged,removedandreplaced,orchanged.
ObservematerialtransferfromeachProcessModule,fromeachcassetteslotineach
LoadLock,fromtheAligner,andfromtheCooler.
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Alignment Procedure
Personal Protective Equipment
Thisproductcontainsheavyobjectsthatmaycausepersonalinjury.
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Usesafetyshoesandheadprotectionwheninstallingormaintainingtheproduct.
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Wearprotectiveeyewearwhensettinguportestingthesystem.
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AllcassettesusedwithinVacuumCassetteElevatorsattachedtotheMarathonExpressmustmeetSEMIMESC
standards.Notethatitispossibleformoldedcassettesto“shrink”,shorteningthespacingbetweenslots.
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Step Action
1.
Positioncassetteswithwafersinslots1,12,and25intoeachVCE.
2.
Usingtherobot'sCDM,PICKandthenPLACEthewafersinoneVCE.DuringthePickandPlace
operations,observethemovementtoverifyproperplacement.
NOTE: Thewafersshouldmoveintoandout-ofthecassetteswithoutanycontact.
3.
RepeattheprocedureforthesecondVCE.
4.
Replaceoneofthecassetteswithanemptycassette.
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