Brooks Marathon Express - Vce

Brooks Automation 4. Subsystems
Part Number: 605914 Rev. B Vacuum Load Locks
Figure 4-11: Small Volume Lock
VCE
TheBrooksAutomationVacuumCassetteElevators(VCEs)areSEMI-compatibleinterfaces
designedformanualorautomatedloadingofsubstratecarrierswaitinghorizontalwafertransfer.
TheseelevatorsprovidecassetteindexingtoplacewafersattheWaferTransportPlane.TheVCE
providesaninterfacebetweentheatmosphericenvironmentofthemanufacturingfacilityandthe
vacuumenvironmentoftheclustertool.TheVCEsmaybeprovidedwiththeirownvacuumsystems
includingpumpsandmonitoringtoallowthemtofunctionfullyasVacuumCassetteModules.
TheVCELoadLockisaCE/S2compliantloadlockdesignedtohandleSEMIstandardcassettesof
25or26wafersupto200mm.TheVCEisfabricatedfromaluminumandweighs111kg(245lb).It
isdesignedtobealowcost,corrosionresistant,andserviceablecomponent.
Formoreinformation,refertotheVCEUserManual.
Copyright © 2023, Brooks Automation, Inc.
101