Brooks Marathon Express - Table of Contents

Marathon Express
Part Number: 605914 Rev. B
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Table of Contents
1.Introduction 12
SystemOverview 12
Options 13
Subsystems 13
SupplementaryandRelatedDocumentation 15
ManualNotation 16
Specifications 17
OperatingSpecifications 17
EnvironmentalSpecifications 18
MechanicalSpecifications 19
ElectricalSpecifications 20
ChamberHeatingandCooling 21
FacilitiesSpecifications 21
CommunicationsSpecifications 24
CenterofGravityandFloorLoading 25
SiteRequirementsforMovingtheMarathonExpress 25
ProcessModuleSpaceAllocation 25
ServiceandExclusionZones 25
2.Safety 27
RegulatoryComplianceandDeclarationofIncorporation 28
ExplanationofHazardsandAlerts 29
SafetyText 29
SafetyIcons 29
SignalWordsandColor 29
AlertExample 30
GeneralSafetyConsiderations 31
IllustrationofHazardLocations 33
SafetyandIdentificationLabels 34
IllustrationofHazardLocations 36
Interlocks 40
Lockout/Tagout 41
MechanicalHazards 42
LidLockout/TagoutProcedure 43
ElectricalHazards 45
DisconnectDevices 46
LaserHazards 46
ThermalHazards 47
VacuumHazards 48
ErgonomicsHazards 50
TipHazard 50
EnvironmentalInformation 51
NoiseEmission 51
Vibration 51
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