Brooks Marathon Express - Vacuum Hazards

2. Safety Marathon Express
Vacuum Hazards Part Number: 605914 Rev. B
Extreme Temperature
Surfacesheatedduringsystembake-outcanreachtemperaturesof121°C(250°F),
whichcouldcauseburnswhenincontactwithskin.
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Oncesystemheatinghasbeenstarted,allpersonnelmustkeepawayfromthesystemto
avoidpossibleburninjuryduetohightemperatures.
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AllowtimefortheMarathonExpresstocoolbeforeservicingoroperatingandbefore
performingmaintenanceinvolvingvolatilechemicals.
Vacuum Hazards
TheBrooksAutomationMarathonExpressisdesignedforuseasanatmosphericvacuum
equipmenttransportsystem.VacuumpumpsareusedwithinthevacuumsideoftheMarathon
Expresssystemtoprovideahighvacuumenvironment.Thesevacuumpumpsmaybeexposedto
hazardouschemicalsleftonthematerialafterprocessing.
AllvacuumsuppliedtotheMarathonExpressmustbedisconnectedasoutlinedinthefacility’s
lockout/tagoutproceduresbeforeservicing,orinjurymayresultfromtheautomaticoperationofthe
equipment.Ifnosuchproceduresexist,followtheguidelinesprovidedin"LaserHazards"onpage
46.
Wheneveranyvacuumpumpexhaustisvented,thefacility’senvironmentalproceduresmustbefollowed
regardingtheventingofgases.
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Implosion Hazard
Implosionmayresultfromequipmentdamage,whichcouldresultinpersonalinjuryor
death.Openinganunequalizedvacuumslotvalveoratmosphericdoormayresultin
severedamagetotheequipmentorMarathonExpressinprocessorcausepersonal
injury.
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Itisessentialthatacompleteinspectionoftheequipmentbeperformedpriortouse.
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