Brooks Marathon Express - Controls and Indicators; Topcooler Operation; Topligner Vacuum Aligner Operation

Brooks Automation 6. Operation
Part Number: 605914 Rev. B TopCooler Operation
Figure 6-14: Gas Facilities Panel Operation
Controls and Indicators
TheGasFacilitiesPanelusestwoDigitalPressureSwitchesformonitoringtheflowandindicating
thepressureofthefacility’ssuppliedgases.
Controlofgasflow,onoroff,isthroughtheVerifloknob;CLOSEshutsoffthegassupplytothe
MarathonExpresssystemandOPENallowsflow.
RefertotheSystemBlockDiagramandVacuumandVentDiagramssuppliedwiththismanual.
TopCooler Operation
RefertotheTopCoolerUserManualformoreinformation.
TopLigner Vacuum Aligner Operation
Refertothealignermanualformoreinformation.
Copyright © 2023, Brooks Automation, Inc.
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