Brooks Marathon Express - Teach the Robot with the Topcooler

8. System Alignment Marathon Express
Teach the Robot with the TopCooler Part Number: 605914 Rev. B
Step Action
6.
Centerawaferontheendeffectorand,usingtherobot’sCDM,teachtherobottheBTOvalueforthe
TopLigner.
SETUP -> STATIONS -> 7 -> CR -> LEARN R, T, BTO -> HAND LOCATE

a. Manuallymovetherobot’sendeffectorintotheTopLigner,adjustingZasnecessarysothe
waferclearsthealignerpins(1.5mm(0.06in)minimum).NotethatthisBTOvaluewillbe
differentfromtheBTOfortheLoadLocksandProcessModules.
b. OncethewaferispositionedcorrectlysavetheBTOvalueforthevacuumrobotusingtheCDM.
ESCAPE -> STORE -> BTO -> QUIT
7.
Teachtherobottheamountitmusttraveldowntodepositthewaferandprovidetheendeffector
clearancewhilemovingunderthewafer.

SETUP -> STATIONS -> 7 -> CR -> LEARN LOWER -> JOG

a. Jogthewaferdownintopositionandcontinuejoggingdownsotheendeffectorisequally
spacedbetweenthewaferandtherotatechuck.
b. OncethewaferandendeffectorarepositionedcorrectlysavetheLowervalueusingtheCDM.
ESCAPE -> STORE -> L -> QUIT
8.
Usingtherobot’sCDM,movetherobot’sarmoutoftheTop-Ligner.
SETUP -> STATIONS -> 7 -> CR -> LEARN R, T, BTO -> HAND LOCATE

a. Movetherobot’sarmwiththewaferoutoftheTopLignerandexituseofthevacuumrobotusing
theCDM.
QUIT
9.
RecordtheStationcoordinatesintheappropriateworksheetprovidedinAppendixC:"StationIden-
tification"onpage221.
Teach the Robot with the TopCooler
IftheMarathonExpressisequippedwithaTopCooler,itisnecessarytoteachtherobotthestation
locationofthewaferpositionwithinthecooler.NotethatthisprocedureisforusewithMarathon
ExpresssystemsrunningWAVEIISoftware.
NOTE: Thestationsreferencedhereareforastandardconfiguration.Actualstation
assignmentsmayvarybasedonthesystemconfiguration.
Changingstationassignmentsmaycauseinterlockstobeignored.Changingthe
stationnumbersrequiresreconfigurationofallstationoptions.
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