Brooks Marathon Express - Appendix C: Station Identification

Brooks Automation 12. Appendices
Part Number: 605914 Rev. B Appendix C: Station Identification
Appendix C: Station Identification
TheBrooksAutomationMarathonExpressiscustomizedatthefactorytotheusersspecified
parameters.AccompanyingtheMXsystemisaBrooksAutomationAcceptanceTest(AT)which
listsallthefactoryassignedparameters.Intheoccurrencethattheuserreplacesanymodules
withintheMarathonExpressorre-configurestheMXsystem,thenewparametersshouldbe
recordedinthetableprovidedinthissection.
Stn
Station Name
(Position | Wafer Size)
R T
Z
(BTO)
Lower Slots Pitch
1
LoadLockB-Arm‘A’
LoadLockB-Arm‘B’
     
2
LoadLockA-Arm‘A’
LoadLockA-Arm‘B’
     
3
ProcessModule1-‘A’
ProcessModule1-‘B’
     
4
ProcessModule2-‘A’
ProcessModule2-‘B’
     
5
ProcessModule3-‘A’
ProcessModule3-‘B’
     
6
ProcessModule4-‘A’
ProcessModule4-‘B’
     
7
ProcessModule5-‘A’
ProcessModule5-‘B’
     
8
ProcessModule6-‘A’
ProcessModule6-‘B’
     

TopCooler-‘A’
TopCooler-‘B’
     

WaferBuffer-‘A’
WaferBuffer-‘B’
     

TopLigner-‘A’
TopLigner-‘B’
     
       
       
       
       
Table 12-1: System Assignments Log - MagnaTran Robot
Copyright © 2023, Brooks Automation, Inc.
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