Brooks Marathon Express - Thermal Hazards

Brooks Automation 2. Safety
Part Number: 605914 Rev. B Thermal Hazards
Figure 2-8: Laser Locations
Laser Radiation
Laserradiationmaycauseseriouseyeinjury.
l
Knowthepowerandhazardlevelofalllasers.
l
Avoidexposuretolaserhazards.
l
Donotlookdirectlyatorintothelaserbeam(nomatterwhatClassoflaser).
l
Followanypostedlaserwarningsorlabels.
l
Donotattempttoservice,repair,orremovetheprotectivehousingofthelaserdevice.
Thermal Hazards
HeatingelementsmayexistontheMarathonExpressvacuumtransportchamber.Beawareofhot
surfacesonthetransportchamberduringservicingandoperation.Brooksrecommendsplacing
barriersaroundtheMarathonExpresssystemwhilebake-outisinprocesstoensurefacility
personneldonotcomeintocontactwithanyhotsurfaces.
Copyright © 2023, Brooks Automation, Inc.
47