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Brooks Marathon Express - Topcooler Poppet Open;Close Sensor Adjustment; Topligner Support Pin Replacement; Isolation Valve Replacement

Brooks Marathon Express
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9. Maintenance and Repair Marathon Express
Repair Procedures Part Number: 605914 Rev. B
Step Action
2.
a. Removethewasher,securingthegroundwireandtheheatercartridgetothebottomofthe
chamber.
b. Slidetheheatercartridgeoutofthechamber.
c. DisconnecttheHeaterAssemblyfromthewiringharnessrunningbelowthechamber.
d. Removethelidfromthechamber,takingcarenottodamagethesealingsurfaceonthe
chamberoranyofthelidhardware.
e. ConnectthenewHeaterAssemblytothewiringharness.Ensurethatnoneofthewirescontact
thechambertopreventdamageduringaheatingcycle.
f. Insertthenewheatercartridgeintotheholeinthebottomofthechamber.
g. Runthegroundwireforthenewheatercartridgetothemountingholenexttotheheater.
h. Replacethewasherandscrew,ensurethatthewasherextendsovertheheatercartridgeto
holditinplace.
TopCooler Poppet Open/Close Sensor Adjustment
SeetheTopCoolerPoppetOpen/CloseSensorAdjustmentprocedureintheTopCoolermanualfor
moreinformation.
TopLigner Support Pin Replacement
Seethealignermanualformoreinformation.
Isolation Valve Replacement
FacetSlotValve
Thefacetslotvalvegateactuatorandtheatmosphericdoorarereplaceableunits.Thisactuatoris
removablefromtheundersideofthevalvewithouthavingtoremovethevalve.RefertotheOEM
Manual.
202
Copyright © 2023, Brooks Automation, Inc.

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