Brooks Marathon Express - TopCooler Cool Chuck Cleaning

Brooks Automation 9. Maintenance and Repair
Part Number: 605914 Rev. B TopCooler Cool Chuck Cleaning
Step Action
3.
Cleaning the TopLigner Vacuum Aligner:

IfavacuumalignerisinstalledontheMXsystemandcontaminationentersthealignerchamber,
cleaningisnecessary.
a. Removeallwafersfromthealigner.
b. Removepoweranddisconnectallcablestothevacuumaligner.
c. Loosenthescrewsinthetopcoverandremovethetopcover.
d. CleantheinteriorofthealignerusingtheGeneralCleaningProcedureinStep4.
e. Replacethelid,securethehardware,andreconnectallcables.
4.
General Cleaning Procedure:
a. RemoveanyhazardousmaterialsfromtheMarathonExpresssystem’ssurfacesfollowingthe
facility’sproceduresforthosematerials.
b. Cleanallexposedsurfacesusingcleanroomwipesmoistenedwithisopropylalcohol.
c. Onceallcontaminateshavebeenremoved,usecleanroomwipesmoistenedwithDIwaterto
removeanyresidues.
d. Onceallresidueshavebeenremoved,usedrycleanroomwipestodryallsurfaces.
NOTE: Wipemustbemoistenedonly;squeezingthewipeshouldnotcauseanywatertodrip.Donot
allowalcoholtocomeincontactwithbearings,seals,etc.Alcoholshouldnotbeusedontheoptional
perfluoroelastomer(Kalrez)endeffectorpads.
NOTE: Wipemustbemoistenedonly;squeezingthewipeshouldnotcauseanywatertodrip.Donot
allowalcoholtocomeincontactwithbearings,seals,etc.
5.
EnsurethattheLoadLockdoorandtheTransportChamberlidareclosed.
6.
Reconnectallpower,communications,andairconnections,thenre-energizethesystemfollowingthe
"Power-upSequence"onpage79.
TopCooler Cool Chuck Cleaning
TheCoolChuckmaybecleanedwithoutremovingitfromtheTransportChamber.
ProcedureCategory
Type1Procedure:Equipmentisfullyde-energized.
RequiredTools
l
MetricHexWrenches
MaintenanceStrategy
TheCoolChuckisreadilyaccessibleafterremovingthedrop-inPoppetAssembly.Turnoffand
disconnectallpower,communications,andairconnectionsasdetailedin"Shut-down"onpage1.
Copyright © 2023, Brooks Automation, Inc.
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