Brooks Marathon Express - Align the Load Locks SPS; Teach the Robot the Integral Wafer Buffer Station

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Teach the Robot the Integral Wafer Buffer Station
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Align the Load Lock’s SPS
TheSubstratePresentSensor(SPS)oneachelevatormustbeadjustedtoensureproperdetection
ofwafersinallslotsofthecassettes.Thisprocedurevariesslightlydependingonthetypeof
sensingandwhetherthewaferpresentsensingwillbeaccomplishedattheWaferTransferPlaneor
abovetheWaferTransferPlane.
RefertheVCEUserManualtoadjusttheSPS.
NOTE: ThisadjustmentwilldisturbthefactorysettingoftheSubstratePresentSensor
(SPS).Verifythatthesensorisoutofalignmentbeforeperformingthefollowing
procedurebyperformingtheMAPcommandandverifyingcorrectwafercountand
slot.RefertotheCommandReferenceintheVCEUserManual.
Iftherobot’sendeffectorischangedafteraligningtheSPS,re-aligningboththe
PlatformandtheSPSmaybenecessarytoensureaccuratewaferdetectionasthe
elevator’splatformisalignedtotheendeffectorandallelevatorsystemsarealigned
totheplatform.
Teach the Robot the Integral Wafer Buffer Station
ThefollowingprocedureteachestherobottheIntegralWaferBufferStation.TeachingtheExternal
BufferStationisthesameasteachinganyProcessModule,referto"TeachtheRobottheProcess
Modules"onpage167.NotethatthisprocedureisforusewithMarathonExpresssystemsrunning
WAVEIISoftware.
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NOTE: Itmaybehelpfultouseaglasswaferwithcross-hairsscribedintoittolocate
thecentersoftheWaferBufferStation.
Thestationnumberreferencedhereisforastandardconfiguration.Actualstation
assignmentsmayvarybasedonthesystemconfiguration.
Changingstationassignmentsmaycauseinterlockstobeignored.Changingthe
stationnumbersrequiresreconfigurationofallstationoptions.
ProcedureCategory
Type2Procedure:Equipmentisenergizedandallenergizedcircuitsarecoveredorinsulated.All
workisperformedremotelyusingtheCDMorservicecomputer.
Copyright © 2023, Brooks Automation, Inc.
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