Brooks Marathon Express - Procedure Category; Required Tools and Test Equipment; Alignment Strategy

8. System Alignment Marathon Express
Overview Part Number: 605914 Rev. B
NOTE: Evenasmallmis-alignmentcaninterferewithpropersystemoperationand
causeunnecessarydowntime.Followallstepstoensureprecisealignment.
Procedure Category
Type2Procedure:Equipmentisenergizedandallenergizedcircuitsarecoveredorinsulated.All
workisperformedremotelyusingtheCDMorservicecomputer.
Required Tools and Test Equipment
Performingthealignmentprocedurerequiresthefollowingtoolsandmaterials:
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TheparametersheetfortheMarathonExpresssystem’sstationsfromtheSystemAcceptanceTest
(ATP)shippedwiththesystem
l
AcomputerrunningaterminalemulatororadumbterminalwithaRS-232mSerialcommunications
connection
l
ASerialCommunicationCable
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AsetofHexwrenchesininchsizes
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AsetofHexwrenchesinmetricsizes
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15/16inchopenendorsocketwrench
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A150mm(6in)steelrulergraduatedinhundredths
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TheControl/DisplayModule(CDM)fortherobot
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2processcassettesofthetypeusedinnormalprocessing
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MicroToolDummyWafersortestmaterialofthesizeforwhichthesystemisbeingsetup(minimumof10
wafers)
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MicroToolElectroniclevelorequivalent(bubblelevel)
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A1m(3ft)bubblelevelorequivalent
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Systemteachfixtures
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TheusermanualsforallcomponentswithintheMarathonExpress
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TheusermanualsforanydevicesinterfacingwiththeMarathonExpress
Alignment Strategy
TheMarathonExpressisanAtmospherictoVacuumClusterToolIntegrationPlatformforProcess
Modules.ToproperlyaligntheMXsystemitmustbeattachedtotheProcessModulesitwillbeused
with.
TherobotwithintheMXsystemdoesnothavelevelingadjustments.Therobotismounteddirectly
tothechamberoftheMarathonExpressVacuumBackEnd.AdjustmentoftheMXsystem’s
modulesispartofthealignmentoftheMarathonExpressduringinstallation.Allcomponentsofthe
MXsystemmustbeleveledrelativetotherobot.
Theproceduresprovidedhereareforabasicsystemalignment.Refertotheappropriateuser
manualsfordetailedalignmentinformation.
NOTE: Athoroughalignmentprotectsagainstequipmentdamageandmisalignedor
slidingmaterial,whichcouldleadtopersonalinjury.
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