Brooks Marathon Express - Alignment Process

8. System Alignment Marathon Express
Overview Part Number: 605914 Rev. B
SystemAlignment-WaferAlignmentPhase
Oncestationvalueshavebeendefinedthatensuremechanicalintegrityduringwafertransport
operationtoandfromeachstationwithinasystem,asecondphaseofsystemalignmentis
performed.Thissecondalignmentphase,calledtheWaferAlignmentPhase,utilizesanabsolute
truepositionreferencetopositionthewaferontherobot'sendeffectortooptimizetheaccuracyof
wafertransferfromonelocationwithinthesystemtoanyotherlocationwithinthesystem.
Havinga“trueposition”meansthatthewafercanbe“centered”ontherobot'sendeffectoratthe
samepositioninareliableandrepeatablefashion.However,thisdoesnotmeanthatthewafermust
bephysicallycenteredontheendeffector;itmeansthatthewafercanbeconsistentlylocatedin
exactlythesamepositionontherobot'sendeffectoreverytimea“Pick”fromastation,oradelta
“Pick”fromanaligner,isperformed.
Alignment Process
Acompleteandaccuratealignmentensuresthatnopartoftherobotorofanymaterialcontactsany
ofthesystem’sinteriorsurfacesandthatnoslidingmotionsoccurbetweenmaterialandany
supportsurfaces.Thealignmentwillbedoneusingtherobot’sControl/DisplayModule(CDM)anda
serialcommunicationsprogramsuchasProcomm™.
NOTE: Thefollowingproceduresareprovidedasareferencetothealignmentofafull
clustertoolsystem.Specialalignmentproceduresintheactualcomponentsuser
manualswilltakepriorityovertheproceduressuppliedinthismanual.

Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,thepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
l
Robot
l
Aligner
l
CoolModulePoppet
l
LoadLockModule(s)(AutoDoor,Arm,Platform)
l
AtmosphericDoors
l
VacuumSlotValves
l
IsolationValves
l
Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.

DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.

Donotoperatetherobotwithouttheprotectivecoversinplace.

DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.
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