Brooks Marathon Express - System Preparation

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Overview

NOTE: Toensureaccuracyandrepeatability,donot“home”therobotduringthe
alignmentprocedureunlessspecificallydirectedtodoso.
Itiscrucialthatthealignmentisperformedinthesequenceshowninthissectionformaximum
operatingperformanceoftheMarathonExpresssystem.Thoseindividualproceduresthatdonot
applytoaspecificsystem(i.e.,alignmenttoaCoolModulewhenthereisnoCoolModuleinstalled)
maybeskipped.Manyoftheadjustmentswillbemadeusingtherobot’sControl/DisplayModule
(CDM)oracomputer.Priortobeginningthealignmentprocedure,ensurethefollowingstepshave
beencompleted.
Step Action
1.
Readthe"AlignmentOverview"onpage143andtheAlignmentProcedures.
2.
Readandunderstand"Safety".
3.
Becomefamiliarwiththesafetywarningsandtheprocedurestoensuresafetywhileperformingthepro-
cedure.
4.
Becomefamiliarwithallattachedsubsystems,includingtheCDM,andthecommandsettobeused.
5.
EnsuretheMarathonExpress,theProcessModule(s),andallassociatedcomponentsareatroom
temperature.
6.
PowerupandinitializetheMarathonExpressandalldevicesthatinterfacewiththeMXsystem.The
systemmustbeinthefollowingstate:
l
Allchambersmustbeatatmosphere
l
Allslotvalvesmustbeopen
7.
Followthealignmentproceduresprovidedinthissectionintheorderpresented.Notethatthissection
providesadetailedoverviewofthealignmentprocess,whichwillreferencetheactualproceduresas
required.
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PreparetheMarathonExpressSystemforAlignment
BeforetheSystemAlignmentcanbeginthesystemmustbeproperlyprepared.Thisincludes
ensuringthesystemislevelandthatthemodulesofthesystemareproperlyinitialized.Referto
"SystemPreparation"onpage148forinstructionsongettingthesystemreadyforalignment.
AttachtheVacuumCassetteElevatorstotheMarathonExpress
TheMarathonExpressistypicallyshippedwiththeVCEsattachedtotheVacuumBackEnd.
Copyright © 2023, Brooks Automation, Inc.
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