Brooks Marathon Express - Set the Robot to the VCE WTP

8. System Alignment Marathon Express
Vacuum Cassette Elevator Configuration
and Alignment
Part Number: 605914 Rev. B
Set the Robot to the VCE WTP
Automatic Movement / Crush hazard
WheneverpowerisappliedtotheMarathonExpress,thepossibilityexistsofautomatic
movementthatcancauseseriousinjuryordeath.Thesecomponentsinclude:
l
Robot
l
Aligner
l
CoolModulePoppet
l
LoadLockModule(s)(AutoDoor,Arm,Platform)
l
AtmosphericDoors
l
VacuumSlotValves
l
IsolationValves
l
Pumps
Movingmechanismsdonothaveobstructionsensorsandcancauseseriouspersonal
injuryordeath.

DonotoperatetheMarathonExpresswithouttheprotectivecoversinplaceandall
safetyinterlocksenabled.

Donotoperatetherobotwithouttheprotectivecoversinplace.

DonotoperatetheVacuumSlotValvesorAtmosphericDoorswhenthechamberlidis
open.

AlwaysverifyproperoperationoftheCDME-Stopbuttonbeforeperforminganyteachproceduresbypressingthe
E-Stopbuttonandverifyingthatthearmisnolongerpoweredandthatwhilethebuttonisdownnomotion
commandsareaccepted.

Arobotcontrollerparameter,calledtheBaseTransferOffset(BTO),setstheheightoftherobot’s
transportplanetotheheightofthesystem’sMaterialTransportPlane(MTP).TheBTOisthe
verticaldistancefromtherobot’shomepositiontoitsUP(materialtransport)position.TheMarathon
ExpressisdesignedtooperatewiththeWTPattheSEMIMESCstandardheight.Theprocedure
outlinedbelowutilizesaspecialgaugeblockprovidedwiththesystemsothattherobot’sWTPcan
besetcorrectlyandquickly.
Thisprocedureusesthefloor(i.e.,bottomsurface)ofeitherLoadLock’saccessslotsasareference
pointfordeterminingtheBTOtothesystem’sWTP.Assumingthatthesystemhasbeeninstalledto
conformtotheSEMIMESCheightstandards,theSEMIMESCMTPindicatedbytheWTPscribe
markonthesideofthechamber,islocated32.50mm(1.280in.)abovetheflooroftheaccessports.
Tofacilitatethisprocedure,theMarathonExpressissuppliedwitharectangulargaugeblock
(BrooksP/N001-5628-02)havingmeasurementsthatinclude32.49mm(1.279in.)asshownin
Figure8-2.TheproceduredescribedbelowusesthisgaugeblocktosetthesystemWTPabovethe
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