Brooks Marathon Express - Configuration and Alignment Strategy

Brooks Automation 8. System Alignment
Part Number: 605914 Rev. B Vacuum Cassette Elevator Configuration and Alignment
stationnumbersrequiresreconfigurationofallstationoptions.
TheVacuumAlignerstationmustbetaughtpriortoteachingtheVacuumCassette
Elevators.
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ProcedureCategory
Type2Procedure:Equipmentisenergizedandallenergizedcircuitsarecoveredorinsulated.All
workisperformedremotelyusingtheCDMorservicecomputer.
RequiredToolsandTestEquipment
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SpecificVCEUserManual
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CDM(Control/DisplayModule)
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MicroToolDummyWaferortestmaterialoftheappropriatesize
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Cassetteoftheappropriatesizewithunbreakablewafers
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AcomputerrunningaterminalemulatororadumbterminalandaserialI/Ocable
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BrooksgaugeblockP/N001-5628-02
Configuration and Alignment Strategy
ConfiguringthesystemrequiresteachingtherobotthelocationoftheVacuumCassetteElevators,
andopeningtheinterfacewiththeVCEs.Refertotherobotmanualforinstructionsonusingthe
CDMandteachingstations.
PriortoteachingtheLoadLockstations,theVCEsmustbelevel.
NOTE: Forthisprocedure,thewaferisassumedtobealigned.Shouldanything
happentojarthewaferontheendeffector,repeatthealignmentportionofthealigner
teachingproceduretore-alignthewafer.
Fortheprocedureprovidedbelow,thefollowingconfigurationisassumed:
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VacuumCassetteElevatoronleft-handsideisVCEA
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VCEAisStation1
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VacuumCassetteElevatoronright-handsideisVCEB
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VCEBisStation5
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