Brooks Marathon Express - Options; Subsystems Overview

Brooks Automation 1. Introduction
Part Number: 605914 Rev. B System Overview
Figure 1-1: Brooks Automation Marathon Express
TheSEMIS2andCEregulatorycompliantMarathonExpressClusterToolIntegrationPlatform
offersintegralsupportforallsystemstructures.TheintegratedframearchitectureoftheMXsystem
supportsstandardOEMSEMIrollupstyleprocessmoduleswithstandardinterfacingtoframeand
facetandMESCboltonstyleprocesschambers.
Options
l
TopCooler(wafercoolmodule)
l
VXAligner(vacuumaligner)
l
Completeslotvalve/processmodule/robothardwareinterlockingdependingonSystemIntegrationLevel
Subsystems
TheMarathonExpressismadeupofseveralfunctionalsubsystemsdesignedforeaseofuse,
maintenance,andrepair.Thesesubsystemsaremodularindesigntoalloweaseofmaintenance
andtominimizeMeanTimeToRepair(MTTR).TheindividualmodulesthatmakeuptheMX
systemaredescribedbrieflybelowandindetailin"Subsystems".
MarathonExpress™VacuumTransportSystem
TheBrooksAutomationMarathonExpressVacuumBackEndisamultifacetedClusterTool
IntegrationPlatformutilizingprovenBrookscomponentssuchastheVCEvacuumcassette
elevatorandMagnaTranLEAPvacuumrobot.
Copyright © 2023, Brooks Automation, Inc.
13